基于常压等离子体引发化学气相沉积法锡/碳/TiO_(2)纳米纤维的制备及其沉积参数探究  

Preparation and deposition parameter of Sn/C/TiO_(2) nanofiber based on AP-PECVD technology

作　　者：唐海军 夏鑫[1] Tang Haijun;Xia Xin(College of Textiles and Clothing,Xinjiang University,Urumqi 830046)

机构地区：[1]新疆大学纺织与服装学院,乌鲁木齐830046

出　　处：《化工新型材料》2021年第6期160-163,170,共5页New Chemical Materials

基　　金：国家自然科学基金(51763022);新疆特色纺织材料开发应用研究创新团队(2017D14002)。

摘　　要：为研究等离子体引发化学气相沉积(PECVD)实验中距离和功率对基底材料以及生成的二氧化钛(TiO_(2))纳米颗粒形貌结构的影响,通过自主研发的常压PECVD(AP-PECVD)设备,以钛酸丁酯为钛源,在锡/碳(Sn/C)纳米纤维表面沉积大量的TiO_(2)纳米颗粒。通过扫描电镜和透射电镜观察了Sn/C/TiO_(2)纳米纤维的形貌结构,采用X射线衍射仪研究了Sn/C/TiO_(2)纳米纤维的晶形结构。结果表明:自主研发的设备沉积了大量的纳米颗粒;通过对功率和距离参数变化后沉积的Sn/C/TiO_(2)纳米纤维测试发现,当功率为100W、距离为7mm时,沉积上的纳米颗粒直径在10~30nm之间,纳米纤维形貌保持良好,纤维内部结构基本没有被破坏;沉积上的TiO_(2)纳米颗粒为非晶结构。In order to find the effects of distance and generated power on the basal material and titanium dioxide(TiO_(2))nanoparticles morphology structure in the plasma enhanced chemical vapor deposition(PECVD)experiment,large amount of TiO_(2)nanoparticles could be deposited on the surface of tin/carbon(Sn/C)nanofibers through the selfdesigned atmospheric pressure PECVD device while the titanium source was tetrisobutyl titanate.The morphology structure of Sn/C/TiO_(2)nanofiber was tested by scanning electron microscopy(SEM)and transmission electron microscope(TEM),the crystal structure of Sn/C/TiO_(2)nanofiber was tested by X-ray diffraction(XRD).The results shown that the self-designed AP-PECVD device successfully deposited a large amount of nanoparticles,through the testing of Sn/C/TiO_(2)nanofibers which the power parameters and distance changed during the deposition found that when the power was 100 w,distance was 7 mm,the diameter of nanoparticles were between 10~30 nm,the morphology of nanofibers were all keep in well and the internal structure wereundamaged.Most of the TiO_(2)nanoparticles presented amorphous structure.

关 键 词：常压等离子体引发化学气相沉积 沉积参数 锡碳纳米纤维 二氧化钛纳米颗粒 

分 类 号：TB30[一般工业技术—材料科学与工程] TQ340[化学工程—化纤工业]