基于光丝效应的飞秒激光单次高质量直接切割薄石英玻璃工艺研究(特邀)  

Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect(Invited)

作　　者：廖恺 王文君[1,2] 梅雪松[1,2] 刘斌[1,2] LIAO Kai;WANG Wenjun;MEI Xuesong;LIU Bin(State Key Laboratory for Manufacturing Systems Engineering,Xian Jiaotong University,Xi'an 710054,China;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710054 [2]西安交通大学机械工程学院,西安710049

出　　处：《光子学报》2021年第6期3-14,共12页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2017YFB1104602)。

摘　　要：提出了一种基于光丝效应的利用高重频飞秒激光结合高速扫描振镜对200μm石英玻璃进行单次直接切割的方法。优化加工工艺参数,实现了薄石英玻璃的快速高质量切割,加工速度可以达到10 mm/s,崩边小于7.5μm,断面粗糙度小于1μm。该方法实现了薄玻璃切割效率和质量的同步提升,在激光加工领域有较好的应用前景。A one-step direct cutting method of 200μm quartz glass using high-repetition frequency femtosecond laser combined with scanning galvanometer based on filament effect was proposed.Through the optimization of the processing process parameters,the fast and high-quality cutting of thin quartz glass is realized.The processing speed can be achieved 10 mm/s,the edge chipping is less 7.5μm,and the roughness of the cross section is achieved 1μm.The method realizes the simultaneous improvement of thin glass cutting efficiency and quality,and has a good application prospect in the field of laser processing.

关 键 词：激光光学 激光成丝 飞秒激光 石英玻璃 玻璃切割 

分 类 号：TN249[电子电信—物理电子学]