飞秒激光直写偏振转换器件和几何相位器件(特邀)  

Femtosecond Laser Direct Writing for Polarization Convertors and Geometric Phase Elements(Invited)

作　　者：王磊[1] 王熠[2] 王琳 徐帅 樊华[2] 牛立刚[1] WANG Lei;WANG Yi;WANG Lin;XU Shuai;FAN Hua;NIU Ligang(College of Electronic Science&Engineering,Jilin University,Changchun 130012,China;Department of Precision Instrument,Tsinghua University,Beijing 100000,China)

机构地区：[1]吉林大学电子科学与工程学院,长春130012 [2]清华大学精密仪器系,北京100000

出　　处：《光子学报》2021年第6期38-49,共12页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2017YFB1104300)。

摘　　要：光学器件的微型化和集成化是当前研究的热点,其中利用微纳结构实现局域电磁改性的超构光学更是引人关注。本文从微纳结构的制备出发,总结了利用超衍射精密加工的飞秒激光直写技术,制备偏振转换器件和几何相位器件的工作。介绍了微纳结构改性的物理机制,飞秒激光直写光刻胶、飞秒激光烧蚀金属薄膜、飞秒激光诱导纳米光栅等手段在偏振转换器件和几何相位器件制备方面的进展,展望了飞秒激光微纳加工技术在超构光学器件制备方面的挑战。There is a growing popularity of the miniaturization and integration of various optical elements.In particular,the meta-optics has attracted great interests by manupulating the electric-magnectic properties of materials.Herein,we reviewed the recent advances on the fabrication and characterization of polarization convertors and geometric phase elements by femtosecond laser direct wirting.Firstly,the mechanism of meta-optics will provide.Then,we will review the fabrication technologies for meta-optics by femtseond laser direct writing in photoresist,laser ablation on metal film,and femtosecond laserinduced nanogratings in the bulk.Finally,we will comment on the challenges of femtosecond laser micro/nanotechnologies for meta-optics.

关 键 词：飞秒激光 偏振转换 几何相位 纳米光栅 微光学 

分 类 号：TN249[电子电信—物理电子学]