飞秒激光双光束干涉高效率地制备硅表面超亲水结构  

Highly Efficient Fabrication of Superhydrophilic Structures on Silicon Surface by the Interference of Two Femtosecond Laser Beams

作　　者：李艳丽 贾鑫 曹凯强 张枫茁 陈龙 贾天卿[1] LI Yanli;JIA Xin;CAO Kaiqiang;ZHANG Fengzhuo;CHEN Long;JIA Tianqing(State Key Laboratory of Precision Spectroscopy,East China Normal University,Shanghai 200241,China;School of Arts and Sciences,Shanghai Dianji University,Shanghai 201306,China)

机构地区：[1]华东师范大学精密光谱科学与技术国家重点实验室,上海200241 [2]上海电机学院文理学院,上海201306

出　　处：《光子学报》2021年第6期100-107,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.12074123,11804227,91950112);上海市科学技术委员会(No.19ZR1414500);强场激光物理国家重点实验室开放基金(中国科学院上海光学精密机械研究所)。

摘　　要：利用飞秒激光双光束干涉技术,结合柱透镜线扫描技术,在30 s内制备了面积为10 mm×10 mm的微米-纳米复合结构,极大地提升了激光加工效率。飞秒激光刻蚀后的硅表面包含双光束干涉引起的长周期微米结构,以及飞秒激光诱导的纳米周期结构。微米-纳米复合结构极大地提升了表面粗糙度,在毛细效应的作用下,硅在空气中显示出超亲水性,接触角从40°降为0°。测量烧蚀前后硅表面的X射线光电子能谱,发现激光加工后硅表面的Si-OH和H_2O分子的含量分别增加22.3%和13.6%,这进一步增强了硅表面的亲水性。随着激光照射功率的增加以及扫描速度的下降,硅表面接触角逐步下降。本文研究为高效制备大面积超亲水结构提供了新方法,在热传导、生物芯片等领域具有潜在的应用价值。Hybrid micro/nanostructures with an area of 10 mm×10 mm are fabricated in 30 s by using the two-beam interference of femtosecond laser combined with the cylindrical lens line scanning technique,which greatly improved the laser processing efficiency.The silicon surface structures contain long-periodic microstructures determined by two-beam interference and the periodic nanostructures induced by femtosecond laser.The hybrid micro/nanostructures greatly improve the surface roughness.Under the effect of capillarity,the ablated silicon surface shows superhydrophilicity in air,and the contact angle drops from 40°to 0°.The X-ray photoelectron spectra of the silicon surface shows that the content of Si-OH and H2O molecules increases by 22.3%and 13.6%,respectively,which further improves the hydrophilicity of silicon surface.With the increase of laser fluence and the decrease of scanning speed,the contact angle of the ablated silicon surface decreases gradually.This provides a new method for the efficient fabrication of large-area superhydrophilic structures,and has potential applications in the fields of heat conduction,biochip,etc.

关 键 词：飞秒激光 双光束干涉 硅 微米-纳米复合结构 超亲水 

分 类 号：TN244[电子电信—物理电子学]