光栅分层结构铝膜塑变应力传递规律研究  

Study on plastic strain stress transfer law of grating layered aluminum film

作　　者：许世英 于硕 张宝庆[2] XU Shiying;YU Shuo;ZHANG Baoqing(Engineering Training Center,Changchun University of Technology,Changchun 130012,CHN;College of Electro-mechanical Engineering,Changchun University of Science and Technology,Changchun 130022,CHN)

机构地区：[1]长春工业大学工程训练中心,吉林长春130012 [2]长春理工大学机电工程学院,吉林长春130022

出　　处：《制造技术与机床》2021年第7期120-124,共5页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金青年基金项目(51405031);国家自然科学基金面上项目(51575057);吉林省自然科学基金项目(20150101023JC)。

摘　　要：近似采用连续均匀介质模型表征分层铝膜机械刻划塑变过程时,无法准确揭示铝膜微观结构对应力传递的影响规律,直接阻碍刻划光栅精密控形成槽技术的获取。首先通过扫描电镜获取光栅毛坯上分层铝膜的微观形貌,结合混合率理论建立具有晶粒晶界特性的两相晶粒模型。其次通过纳米压痕及纳米划痕实验获取分层结构铝膜的力学特性。最后利用Abaqus软件,对光栅机械刻划过程进行仿真分析。分析研究表明:临近刻槽的晶界在形变结束后储存压应力,阻碍下方晶粒中拉应力的释放。仿真中的回弹量与划痕数据相吻合,误差较传统模型减小一半。两相晶粒模型可以很好地揭示具有分层结构铝膜的加载形变规律。When using continuous uniform medium model to characterize the plastic deformation in layered aluminum film mechanical engraving process,it is difficult to accurately reveal the influence of micro-structure of aluminum film on stress transfer,which directly hinders the acquisition of precision control groove forming technology.Firstly,the micro-structure of aluminum film of grating blank was obtained by SEM,and a two-phase grain model reflecting grain boundary characteristics was established based on mixing ratio theory.Secondly,the mechanical properties of the aluminum film with layered structure were obtained by nano indentation and scratch experiments.Finally,the mechanical engraving process of grating was simulated and analyzed by ABAQUS software.The results show that:The grain boundary near the groove stores the compressive stress after deformation,which hinders the release of tensile stress in grain.And springback in the simulation is consistent with the scratch data,the error is reduced by halfcompared with the traditional model,so the two-phase grain model can reveal the loading deformation law of the aluminum film with layered structure.

关 键 词：机械刻划 中阶梯光栅 有限元分析 晶界 纳米压痕实验 

分 类 号：TH164[机械工程—机械制造及自动化]