基于激光扫描法的光阑有效面积计量技术研究  

Research on Measurement of the Effective Area of Apertures Based on a Laser Scanning Method

作　　者：刘志伟 刘文德[1] 许宁 林永杰 林延东[1] 徐楠[1] LIU Zhiwei;LIU Wende;XU Ning;LIN Yongjie;LIN Yandong;XU Nan

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量科学与技术》2021年第6期14-18,共5页Metrology Science and Technology

基　　金：国家重点研发计划项目资助(2018YFB0504601)。

摘　　要：光阑作为限制光束通光面积的常用器件,在光学与光辐射测量中具有广泛的应用。如何准确地测量光阑面积,世界各国计量机构进行了大量的研究。本文首先介绍了激光二维扫描方法,建立了光阑有效通光面积的测量装置,利用此装置测量了一个直径为8 mm的光阑的有效通光面积。本文对有效面积测量的各项不确定度分量进行了分析,包括激光功率稳定性、光阑边缘附近的信号波动,以及积分球散斑和内壁均匀性等。实验表明光阑有效面积测量结果的相对扩展不确定度达到1.8×10^(−4)(k=2)。As a common device to limit the passing-through area of a light beam,apertures are widely used in optics and optical radiation measurement.In order to precisely measure the aperture area,metrology institutes around the world have done a lot of research.In this paper,an effective-aperture-area measurement facility based on a two-dimensional scanning method is established and the area of a circular aperture with a diameter of 8 mm is measured using the facility.The factors affecting the area measurement are analyzed,including the stability of the laser power,the signal fluctuation near the edge of the aperture,the speckle of the integrating sphere,and the uniformity of the inner wall.The experimental results showed that the relative extended uncertainty of the measured effective aperture area was 1.8×10^(−4)(k=2).

关 键 词：光阑有效面积 辐照度 激光扫描法 计量学 测量不确定度 

分 类 号：TN249[电子电信—物理电子学] TB96[机械工程—光学工程]