高纯氧化铝中杂质元素的测定方法研究  

Study on the determination of impurity elements in high purity alumina

作　　者：张宗娥 ZHANG Zong-e(Longkou Donghai alumina Co.,Ltd.,Longkou 265700,China)

机构地区：[1]龙口东海氧化铝有限公司,山东龙口265700

出　　处：《世界有色金属》2021年第9期101-102,共2页World Nonferrous Metals

摘　　要：高纯氧化铝作为制作航空功能器件、精密仪表和集成电路基板等重要元件,其中的杂质种类和含量,直接影响元件性能,因此研究高纯氧化铝中杂质元素的测定方法。研究准备了大量实验仪器与实验试剂,通过选择不同的仪器高频功率、不同的铝基体浓度和酸度,设置三个阶段的实验测定条件。实验结果:在采用1050w高频功率下,各元素的光谱强度和信背比达到最佳状态,测定的杂质结果最优;不同铝基体浓度会对光谱线强度产生微弱影响;不同盐酸酸度会对光谱线强度产生微弱影响。由此可见,测定高纯氧化铝中的杂质元素时,不考虑铝基体浓度和盐酸酸度,通过控制高频功率,得到更为准确的测试结果。High purity alumina is an important component in the manufacture of aviation functional devices,precision instruments and IC substrates.The impurity types and contents directly affect the performance of the components.Therefore,the determination method of impurity elements in high purity alumina is studied.A large number of experimental instruments and reagents were prepared.Three stages of experimental conditions were set up by selecting different instruments'high frequency power,different aluminum matrix concentration and acidity.The results showed that the spectral strength and the signal back ratio of each element reached the best state with 1050W high frequency power,and the impurity results were the best;the concentration of different aluminum matrix had a weak influence on the spectral line strength;the acidity of hydrochloric acid had a weak influence on the spectral line strength.It can be seen that when determining impurity elements in high-purity alumina,more accurate test results can be obtained by controlling high-frequency power without considering aluminum matrix concentration and hydrochloric acid acidity.

关 键 词：高纯氧化铝 杂质元素 元素谱线 信背比 谱线强度 

分 类 号：TH843[机械工程—仪器科学与技术]