真空感应熔炼半导体用热轧NiCr靶微观组织和磁性能分析  

Effect of Hot Rolling Deformation on Microstructure and Magnetic Properties of NiCr Alloy for Semiconductor Applications

作　　者：雷艳华[1] 黄梦真[1] 雷小康 LEI Yanhua;HUANG Mengzhen;LEI Xiaokang(College of Automotive and Mechanical Engineering,Zhoukou Vocational and Technical College,Zhoukou 466000,China;College of Information Science and Technology,Beijing University of Chemical Technology,Beijing 100029,China)

机构地区：[1]周口职业技术学院汽车与机电工程学院,周口466000 [2]北京化工大学信息科学与技术学院,北京100029

出　　处：《真空科学与技术学报》2021年第6期581-585,共5页Chinese Journal of Vacuum Science and Technology

基　　金：河南省高等学校重点科研项目(20B413011)。

摘　　要：采用真空感应熔炼方法制备了半导体用NiCr溅射靶,并对其开展不同变形量下的热轧,分析了NiCr合金受到热轧作用后发生的组织形态变化与磁性能改变。研究结果表明:NiCr合金中形成了呈现面心立方结构的镍基固溶体,合金受到热轧作用后发生了晶粒明显细化现象。随着热轧变形量的逐渐增大,(101)晶面择优取向程度先提高后减小,在热轧阶段组织晶粒发生了转动。随着热轧变形增加,观察到位错出现在晶粒内,部分区域发生了位错的相互缠结,晶粒内形成了小角度晶界。热轧后的试样在磁滞回线中心部位存在更多数量的磁滞回线,增大了矫顽力和剩余磁感应强度。随着热轧变形程度的提高,合金矫顽力Hc随之提高,获得更高磁透率,而剩磁Br先逐渐增大后减小,当热轧变形程度达到10%时,Br出现了迅速增大,之后Br不断下降。The NiCr sputtering target for semiconductors was prepared by vacuum induction melting,and hot rolling was carried out under different deformations.The microstructure and magnetic properties of NiCr alloy were analyzed.The results showed that nickel-based solid solution with face-centered cubic structure was formed in NiCr alloy,and obvious grain refinement occurred after the alloy was hot rolled.With the increase of hot rolling deformation,the degree of preferred orientation of(101)grain surface first increased and then decreased,and the grains were rotated during hot rolling.With the increase of the hot rolling deformation,the dislocation was observed in the grains,and the dislocation was entangled in some areas,and the grain boundaries with small angles were formed.There are more hysteresis loops in the center of the hysteresis loop in the hot-rolled samples,which increases coercive force and residual magnetic induction intensity.With the increase of the hot rolling deformation degree,the alloy coerced Hc increases with the increase of the magnetic permeability,while the remanence Br first increases gradually and then decreases.When the hot rolling deformation degree reaches 10%,the Br increases rapidly and then decreases continuously.

关 键 词：溅射靶 NiCr合金 热轧 位错 磁性能 

分 类 号：TG335[金属学及工艺—金属压力加工]