垂直排列硅上液晶显示器件反射率的提升  

Improvement of reflectivity of vertical alignment liquid crystal on silicon

作　　者：李文娟[1] 郭玉强 马红梅[1,3] 孙玉宝[1,3] LI Wen-juan;GUO Yu-qiang;MA Hong-mei;SUN Yu-bao(Tianjin Key Laboratory of Electronic Materials and Devices, Hebei University of Technology,Tianjin 300401, China;School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China;Department of Applied Physics, Hebei University of Technology, Tianjin 300401, China)

机构地区：[1]河北工业大学电子材料与器件天津重点实验室,天津300401 [2]北京航空航天大学仪器科学与光电工程学院,北京100191 [3]河北工业大学应用物理系,天津300401

出　　处：《液晶与显示》2021年第7期947-953,共7页Chinese Journal of Liquid Crystals and Displays

基　　金：国家重点研发计划(No.2018YFB0703701);国家自然科学基金(No.61475042)。

摘　　要：为了提升垂直排列硅上液晶(VA-LCoS)器件的反射率,本文通过建立常黑型VA-LCoS的三维光学模型,分别用圆偏振光和线偏振光入射,研究了预倾角、液晶盒厚和入射光波长对VA-LCoS器件的反射率的影响。结果表明使用圆偏振光入射能彻底消除亮态像素内黑色区域。本文条件下,1.6μm盒厚的VA-LCoS在圆偏振光入射时有最大的反射率。本研究的结论对VA-LCoS的设计和制备具有一定的指导意义。To improve the reflectivity of vertical alignment Liquid Crystal on Silicon(VA-LCoS),we built a three-dimensional(3D)optical modeling for the normally black VA-LCoS mode,and investigated the effects of the gap of liquid crystal cell,the pretilt angle of liquid crystal and wavelength of incident light on reflection for linearly polarized light and circle polarized light as incident light,respectively.As a result,the black zone in the on-state pixel was eliminated by using circle polarized light as incident light.Moreover,the VA-LCoS has the highest reflection as the cell gap is 1.6μm.The results have an important guiding significance for the design and preparation of VA-LCoS.

关 键 词：硅上液晶 垂直排列 反射率 液晶盒厚 预倾角 

分 类 号：TN141.9[电子电信—物理电子学]