三维微纳米半球周期结构光学表面场分布及复合散射特性  

Surface Field Distribution and Composite Scattering Characteristics of Three-dimensional Micro-nano Hemispherical Periodic Structure Optical Surface

作　　者：巩蕾[1] 刘阳林 于洁 王海斌 王利国[1] 谭林秋 吴振森 GONG Lei;LIU Yanglin;YU Jie;WANG Haibin;WANG Liguo;TAN Linqiu;WU Zhensen(School of Photoelectric Engineering,Xi'an Technological University,Xi'an 710021,China;School of Physics and Optoelectronic Engineering,Xidian University,Xi'an 710071,China)

机构地区：[1]西安工业大学光电工程学院,西安710021 [2]西安电子科技大学物理与光电工程学院,西安710071

出　　处：《光子学报》2021年第7期173-181,共9页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62071359,61905187);陕西省自然科学基金(No.2019JM-238);陕西省教育厅重点科研计划(No.20JS059);西安工业大学校长基金(No.XGPY200206)。

摘　　要：为进一步拓展微纳米周期超结构功能特性,满足光学周期超结构高精度设计需求,基于时域多分辨分析方法,从Maxwell方程出发,推导出微纳米三维半球光学周期结构表面散射耦合场,计算结果与时域有限差分方法结果吻合良好。给出微纳米三维半球光学周期结构表面场分布并数值计算微纳米三维半球光学周期结构表面微分散射截面,提炼分析填充材质、半球尺寸、半球间距等参量对光学周期结构表面散射场影响规律。结果表明:P偏振下电场分布更能突出周期结构表面结构单元轮廓;散射场值随入射角变大,在对应镜面散射角方向逐渐减小;在半径和波长值相当时,填充单元散射场峰值个数与探测范围内填充单元个数吻合;随填充半球间距增大,散射场的极大值数递增,且极大值对应的角度区间依次减小。In order to further expand the functional characteristics of micro nano periodic superstructure and meet the high-precision design requirements of optical periodic superstructure,based on the Multiresolution Time-domain Method(MRTD),starting from Maxwell equation and deducing the surface composite scattering field of the micro-nano three-dimensional hemispheric optical periodic structure,a good agreement is presented when the calculation results are compared with the results of the FDTD method.The surface field distribution of the mico-nano three-dimensional hemispheric optical periodic structure is given and the differential scattering cross section of mico-nano three-dimensional hemispheric optical periodic structure is numerically calculated.The influence of the filling material,hemisphere size,hemispheric distance and other parameters on the surface scattering field is simulated and analyzed.The following conclusions are obtained:the electric field distribution under P polarization could highlight the surface structure unit profile of periodic structure;the scattering field increases with the incident angle,and gradually decreases in the direction of the mirror scattering angle;the peak number of the scattering field of filled unit is consistent with the number of filling units in the detection range when the radius and wavelength values are equivalent;with the increase of the filling hemisphere distance,the maximum value of the scattering field increases successively,and the angle interval corresponding to the maximum value decreases sequentially.

关 键 词：复合散射 光场分布 时域多分辨分析方法 光学周期结构表面 三维半球体 微纳米 

分 类 号：O436[机械工程—光学工程]