Inconel 718高温合金飞秒激光逐层环切打孔技术  

Inconel 718 super-alloy femtosecond laser layer-by-layer trepanning drilling technology

作　　者：陈其杰 任乃飞[1] 任云鹏[1] 辛志铎 岳秀立 CHEN Qijie;REN Naifei;REN Yunpeng;XIN Zhiduo;YUE Xiuli(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)

机构地区：[1]江苏大学机械工程学院,镇江212013

出　　处：《现代制造工程》2021年第7期73-78,共6页Modern Manufacturing Engineering

基　　金：国家973计划基金项目(2011CB013004);江苏省自然科学基金面上项目(BK20161348);江苏省高校自然科学研究项目(11KJA460003,15KJD460002);江苏省科技支撑计划(工业)重点项目(BE2013009);江苏高校优势学科建设工程资助项目;江苏省“六大人才高峰”项目(2013-ZBZZ-025)。

摘　　要：采用波长为1064 nm,脉宽为300 fs的飞秒激光对1 mm厚度的Inconel 718高温合金进行逐层环切打孔,比较了与传统环切打孔的区别,发现逐层环切打孔可以明显降低微孔锥度、提高微孔进出口圆度,从而改善微孔质量。通过控制变量法研究了扫描速度、单脉冲能量及重复频率对飞秒激光逐层环切打孔进出口孔径、微孔锥度等质量的影响。发现扫描速度对微孔出口孔径和出口圆度影响较大,提升重复频率对微孔孔径影响较小,略微降低了微孔锥度;随着单脉冲能量的增加,微孔进口孔径增加,出口孔径先增加再下降,微孔锥度先降低后上升。Layer-by-layer trepanning drilling of Inconel 718 super-alloy with a thickness of 1 mm was processed under 1064 nm wavelength and 300 fs laser pulses.The difference with traditional laser trepanning drilling was compared,it was found that layer-by-layer trepanning drilling can significantly decrease the taper and increase the circularity of the micro hole and then improve the quality of the micro hole.The effect of scanning speed,single pulse energy and repetition rate on the diameter and taper of the micro hole were investigated under femtosecond laser layer-by-layer trepanning drilling by control variable method.It was found that the scanning speed had a great influence on the diameter and circularity of the exit hole,the repetition rate did not have a small effect on the diameter of the micro hole,and slightly decreased the taper of the micro hole.With the increase of single pulse energy,the entrance diameter of the micro hole increased,the exit diameter increased firstly and then decreased,the taper decreased firstly and then increased.

关 键 词：激光技术 飞秒激光 高温合金 逐层环切 锥度 

分 类 号：TN249[电子电信—物理电子学]