基于超连续光源的InGaAs探测器相对光谱响应度定标技术  

Relative spectral responsivity calibration technology of InGaAs photodetector based on super-continuum light source

作　　者：林永杰 徐楠[2] 赫英威[2] 刘文德[2] 甘海勇 龚华平 LIN Yongjie;XU Nan;HE Yingwei;LIU Wende;GAN Haiyong;GONG Huaping(School of Optics and Electronics Technology,China Jiliang University,Hangzhou 310018,China;Institute of Metrology of Optics and Laser,National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学光学与电子科技学院,杭州310018 [2]中国计量科学研究院光学与激光计量科学研究所,北京100029

出　　处：《应用光学》2021年第4期709-716,共8页Journal of Applied Optics

基　　金：国家重点研发计划(2018YFB0504601)。

摘　　要：InGaAs光电探测器是近红外波段重要的光探测器件之一,具有高量子效率、低暗电流、宽带宽等特性,被广泛应用于光电测量、光通信及遥感等领域中。基于超连续白光激光器与双单色仪的光谱比较装置,利用标准InGaAs陷阱探测器对平面InGaAs探测器在900 nm~1600 nm波段进行了相对光谱响应度的定标,并与利用钨灯作为光源的响应度定标结果进行了比较。两种光源条件下,光谱响应度在900 nm~1600 nm波段最大相对差值小于0.2%,取得了较好的一致性。超连续光源的测量重复性最大值小于0.06%,远小于使用卤钨灯的测量重复性1%,降低了因测量重复性贡献的不确定度分量,验证了超连续激光器在探测器相对光谱响应度定标中的可行性。此外,还对被定标的平面探测器光谱响应度结果进行了测量不确定度分析。The InGaAs photodetector is one of the important optical detection devices in the near-infrared band.It has the characteristics of high quantum efficiency,low dark current and wide bandwidth.It is widely used in photoelectric measurement,optical communication,remote sensing and other fields.Based on the spectral comparison device of super-continuum white laser and double monochromator,a standard InGaAs trap detector was used to calibrate the relative spectral responsivity of a planar InGaAs detector in the 900 nm~1600 nm band.The responsivity calibration results of the two light sources were compared.The maximum relative difference of the spectral responsivity in the 900 nm~1600 nm band under the two light source conditions was less than 0.2%,which achieved good consistency.The measurement repeatability of the super-continuum light source is less than 0.06%.It was much smaller than the measurement repeatability of 1% using the halogen lamp,which reduced the uncertainty component contributed by the measurement repeatability.The feasibility of the super-continuum laser in the calibration of the relative spectral responsivity of the detector was verified.In addition,the measurement uncertainty of the spectral responsivity results of the calibrated planar detector was analyzed.

关 键 词：计量学 光电探测器 光谱响应度 超连续光源 定标 

分 类 号：TN215[电子电信—物理电子学]