基于静电耦合的PZT/BTO多层异质薄膜介电增强研究  

Study on Dielectric Enhancement Based on Electrostatic Coulpling of PZT/BTO Heterogeneous Films

作　　者：钟煌 王歆[1] 卢振亚[1] 李心宏 ZHONG Huang;WANG Xin;LU Zhenya;LI Xinhong(School of Materials Science and Engineering,South China University of Technology,Guangzhou,510640 China)

机构地区：[1]华南理工大学材料科学与工程学院,广州510640

出　　处：《中国陶瓷》2021年第7期24-29,共6页China Ceramics

基　　金：国家自然科学基金(U1601208,51577070);广东省自然科学基金资助项目(2019A1515012129)。

摘　　要：采用溶胶凝胶法制备了PbZr(0.52)Ti_(0.45)O_(3)/BaTiO_(3)(PZT/BTO)多层异质薄膜,讨论了保持总厚度相同的情况下,不同周期厚度对多层异质薄膜的铁电和介电性能的影响。研究表明,随着周期厚度的减薄,层数的增加,层间的晶格失配能有效改善薄膜的结晶度,促使薄膜形貌更加平整和均匀,并且有相对较低的损耗和漏电流密度。此外,由于层间极化失配产生的层间静电耦合效应,以及空间电荷极化的存在,PZT/BTO异质薄膜的介电、铁电性能随着周期厚度的减小有着显著的提高。在周期厚度减小到55 nm时,100 k Hz测试频率下,介电常数高达293,品质因数Q为447,并表现出最优的铁电性能。PbZr(0.52)Ti_(0.45)O_(3)/BaTiO_(3)(PZT/BTO) multilayers with varying layer thickness were deposited on Pt/Ti/Si02/Si substrates by sol-gel process.The results show that the lattice mismatch between the layers can effectively improve the crystallinity of the films with thinner layer thickness,and it has better uniform morphology and crystallinity,"whicti helps decrease tiae leakage current density and dielectric loss.In addition,the dielectric and ferroelectric properties of PZT/BTO heterogeneous films are significantly improved with the decrease of the layer thickness due to the interlayer electrostatic coupling effect generated by the interlayer polarization mismatch and the presence of space charge polarization.The dielectric constant is up to 293 and the quality factor Q is 447 at 100 kHz when the layer thickness is reduced to 55 nm,and exhibits the optimal ferroelectric properties.

关 键 词：溶胶凝胶 PZT/BTO 周期厚度 介电 

分 类 号：TQ174.758.2[化学工程—陶瓷工业]