Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration  

作　　者：Xiangguang Han Qi Mao Libo Zhao Xuejiao Li Li Wang Ping Yang Dejiang Lu Yonglu Wang Xin Yan Songli Wang Nan Zhu Zhuangde Jiang 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi’an Jiaotong University,710049 Xi’an,China [2]School of Mechanical Engineering,Xi’an Jiaotong University,710049 Xi’an,China [3]Xi’an Flight Automatic and Control Institute,710049 Xi’an,China

出　　处：《Microsystems & Nanoengineering》2020年第1期165-175,共11页微系统与纳米工程（英文）

基　　金：This work was supported in part by the National Natural Science Foundation of China(Grant Nos.51890884,51421004,and 91748207);the Key Research and Development Project of Shaanxi Province(Grant No.2018ZDCXL-GY-02-02);the Shaanxi Province Natural Science Basic Research Project(2019JC-06);the 111 Program(Grant No.B12016).

摘　　要：In this paper,a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection.The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator.The working mode stress–frequency theory of a double-ended tuning fork with an enhanced coupling beam is proposed,which is compatible with the simulation and experiment.A unique piezoresistive detection method based on small axially deformed beams with a resonant status is proposed,and other adjacent mode outputs are easily shielded.According to the structure design,high-vacuum wafer-level packaging with different doping in the anodic bonding interface is fabricated to ensure the high quality of the resonator.The pressure sensor chip is fabricated by dry/wet etching,high-temperature silicon bonding,ion implantation,and wafer-level anodic bonding.The results show that the fabricated sensor has a measuring sensitivity of~19 Hz/kPa and a nonlinearity of 0.02%full scale in the pressure range of 0–200 kPa at a full temperature range of−40 to 80°C.The sensor also shows a good quality factor>25,000,which demonstrates the good vacuum performance.Thus,the feasibility of the design is a commendable solution for high-accuracy pressure measurements.

关 键 词：RESONANT MODE anodic 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]