Sensitive capacitive pressure sensors based on graphene membrane arrays  

作　　者：Makars Siskins Martin Lee Dominique Wehenkel Richard van Rijn Tijmen W.de Jong Johannes R.Renshof Berend C.Hopman Willemijn S.J.M.Peters Dejan Davidovikj Herre S.J.van der Zant Peter G.Steeneken 

机构地区：[1]Kavli Institute of Nanoscience,Delft University of Technology,Lorentzweg 1,2628 CJ Delft,The Netherlands [2]Applied Nanolayers B.V.,Feldmannweg 17,2628 CT Delft,The Netherlands [3]Department of Precision and Microsystems Engineering,Delft University of Technology,Mekelweg 2,2628 CD Delft,The Netherlands

出　　处：《Microsystems & Nanoengineering》2020年第1期176-184,共9页微系统与纳米工程（英文）

基　　金：M.S.,M.L.,H.S.J.v.d.Z.,and P.G.S.acknowledge funding from the European Union’s Horizon 2020 research and innovation program under grant agreement numbers 785219 and 881603.

摘　　要：The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors.However,for capacitive pressure sensors,the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors.Here,we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small,freestanding double-layer graphene membranes.We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene,even after high-temperature annealing.These sensors are readout using a low-cost battery-powered circuit board,with a responsivity of up to 47:8aF Pa^(−1) mm^(−2),thereby outperforming the commercial sensors.

关 键 词：GRAPHENE ARRAYS thereby 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]