CAD/CAM for scalable nanomanufacturing:A network-based system for hybrid 3D printing  

作　　者：Hae-Sung Yoon Hyun-Taek Lee Ki-Hwan Jang Chung-Soo Kim Hyunseo Park Dae-Wook Kim Kunwoo Lee Sangkee Min Sung-Hoon Ahn 

机构地区：[1]BK21 Plus Transformative Training Program for Creative Mechanical and Aerospace Engineers,Seoul National University,Seoul 08826,Republic of Korea [2]Department of Mechanical and Aerospace Engineering,Seoul National University,Seoul 08826,Republic of Korea [3]Department of Mechanical Engineering,University of Wisconsin-Madison,Madison,WI 53706,USA [4]Institute of Advanced Machines and Design,Seoul National University,Seoul 08826,Republic of Korea

出　　处：《Microsystems & Nanoengineering》2017年第1期135-145,共11页微系统与纳米工程（英文）

基　　金：This work was supported by the Brain Korea 21 Plus project at Seoul National University,the National Research Foundation of Korea(NRF)grants funded by the Ministry of Education,Science and Technology(Nos.NRF-2015R1A2A1A13027910,NRF-2016R1A6A3A03012011).

摘　　要：Micro-and nano-structuring have been highlighted over several decades in both science and engineering fields.In addition to continuous efforts in fabrication techniques,investigations in scalable nanomanufacturing have been pursued to achieve reduced feature size,fewer constraints in terms of materials and dimensional complexity,as well as improved process throughput.In this study,based on recent micro-/nanoscale fabrication processes,characteristics and key requirements for computer-aided design and manufacturing(CAD/CAM)systems for scalable nanomanufacturing were investigated.Requirements include a process knowledge database,standardized processing,active communication,adaptive interpolation,a consistent coordinate system,and management of peripheral devices.For scalable nanomanufacturing,it is important to consider the flexibility and expandability of each process,because hybrid and bridging processes represent effective ways to expand process capabilities.As an example,we describe a novel CAD/CAM system for hybrid three-dimensional(3D)printing at the nanoscale.This novel hybrid process was developed by bridging aerodynamically focused nanoparticle printing,focused ion beam milling,micromachining,and spincoating processes.The system developed can print a full 3D structure using various inorganic materials,with a minimum process scale of 50 nm.The most obvious difference versus CAD/CAM at‘conventional’scales is that our system was developed based on a network to promote communication between users and process operators.With the network-based system,it is also possible to narrow the gap among different processes/resources.We anticipate that this approach can contribute to the development of CAD/CAM for scalable nanomanufacturing and a wide range of hybrid processes.

关 键 词：Computer-aided design and manufacturing(CAD/CAM) NANOMANUFACTURING NETWORK-BASED 3D printing 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]