Scalable integration of nano-,and microfluidics with hybrid two-photon lithography  

作　　者：Oliver Vanderpoorten Quentin Peter Pavan K.Challa Ulrich F.Keyser Jeremy Baumberg Clemens F.Kaminski Tuomas P.J.Knowles 

机构地区：[1]Department of Chemical Engineering and Biotechnology,University of Cambridge,Philippa Fawcett Drive,Cambridge CB30AS,UK [2]Department of Chemistry,University of Cambridge,Lensfield Road,Cambridge CB21EW,UK [3]Cavendish Laboratory,Department of Physics,University of Cambridge,J.J.Thomson Avenue,Cambridge CB30HE,UK

出　　处：《Microsystems & Nanoengineering》2019年第1期264-272,共9页微系统与纳米工程（英文）

基　　金：This work was supported by the Engineering and Physical Sciences Research Council[Grant numbers EP/L015889/1 and EP/L027151/1];the European research Council,the Winton Program for the Physics of Sustainability and the Newman Foundation;the NanoDTC for additional funding and the Maxwell Community for scientific support;This project has received funding from the European Union’s Horizon 2020 research and innovation program under Grant agreement No.674979-NANOTRANS;The work was partially funded by Horizon 2020 program through 766972-FET-OPEN-NANOPHLOW.U.F.K.acknowledges funding from an ERC Consolidator Grant(DesignerPores 647144).

摘　　要：Nanofluidic devices have great potential for applications in areas ranging from renewable energy to human health.A crucial requirement for the successful operation of nanofluidic devices is the ability to interface them in a scalable manner with the outside world.Here,we demonstrate a hybrid two photon nanolithography approach interfaced with conventional mask whole-wafer UV-photolithography to generate master wafers for the fabrication of integrated micro and nanofluidic devices.Using this approach we demonstrate the fabrication of molds from SU-8 photoresist with nanofluidic features down to 230 nm lateral width and channel heights from micron to sub-100 nm.Scanning electron microscopy and atomic force microscopy were used to characterize the printing capabilities of the system and show the integration of nanofluidic channels into an existing microfluidic chip design.The functionality of the devices was demonstrated through super-resolution microscopy,allowing the observation of features below the diffraction limit of light produced using our approach.Single molecule localization of diffusing dye molecules verified the successful imprint of nanochannels and the spatial confinement of molecules to 200 nm across the nanochannel molded from the master wafer.This approach integrates readily with current microfluidic fabrication methods and allows the combination of microfluidic devices with locally two-photon-written nano-sized functionalities,enabling rapid nanofluidic device fabrication and enhancement of existing microfluidic device architectures with nanofluidic features.

关 键 词：LITHOGRAPHY INTEGRATION FLUID 

分 类 号：TN3[电子电信—物理电子学]