Scalable fabrication of sub-10 nm polymernanopores for DNA analysis  

作　　者：Junseo Choi Charles C.Lee Sunggook Park 

机构地区：[1]Department of Mechanical&Industrial Engineering and Center for BioModular Multiscale Systems for Precision Medicine,Louisiana State University,Baton Rouge,LA 70803,USA [2]Department of Comparative Biomedical Sciences,School of Veterinary Medicine,Louisiana State University,Baton Rouge,LA 70803,USA

出　　处：《Microsystems & Nanoengineering》2019年第1期532-541,共10页微系统与纳米工程（英文）

基　　金：This research was supported by the P41 Center for BioModular Multiscale Systems for Precision Medicine(P41EB020594)from the National Institutes of Health。

摘　　要：We present the first fabrication of sub-10 nm nanopores in freestanding polymer membranes via a simple,costeffective,high-throughput but deterministic fabrication method.Nanopores in the range of 10 nm were initially produced via a single-step nanoimprinting process,which was further reduced to sub-10 nm pores via a post-NIL polymer reflow process.The low shrinkage rate of 2.7 nm/min obtained under the conditions used for the reflow process was the key to achieving sub-10 nm pores with a controllable pore size.The fabricated SU-8 nanopore membranes were successfully employed for transient current measurements during the translocation of DNA molecules through the nanopores.

关 键 词：process. POLYMER pores 

分 类 号：TB3[一般工业技术—材料科学与工程]