Magnetic-Particle-Composite-Medium-Filled Stacked-Spiral Inductors for Radio-Frequency CMOS Applications  

作　　者：ZHAN Jing CAI Hua-Lin CHEN Xiao WANG Xin FANG Qiang YANG Yi REN Tian-Ling LIU Li-Tian LI Xin-Xin WANG Albert YANG Chen 詹静;蔡华林;陈晓;王欣;方强;杨轶;任天令;刘理天;李昕欣;王自惠;杨晨(Institute of Microelectronics,and Tsinghua National Laboratory for Information Science and Technology,Tsinghua University,Beijing 100084;Shanghai Institute of Microsystem and Information Technology,Shanghai 200050;Department of Electrical Engineering,University of California,Riverside,CA 92521,USA)

机构地区：[1]Institute of Microelectronics,and Tsinghua National Laboratory for Information Science and Technology,Tsinghua University,Beijing 100084 [2]Shanghai Institute of Microsystem and Information Technology,Shanghai 200050 [3]Department of Electrical Engineering,University of California,Riverside,CA 92521,USA

出　　处：《Chinese Physics Letters》2013年第12期174-178,共5页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant Nos 61025021,60936002 and 61020106006;the National Key Project of Science and Technology of China(2011ZX02403-002);the Special Fund for Agro-scientific Research in the Public Interest of China(201303107).

摘　　要：Magnetic-particle-composite-medium-filled stacked-spiral inductors for rf complementary metal oxide semiconductor(CMOS)applications in GHz are demonstrated.The new inductor features a nearly closed magnetic circuit loop,an optimized high-permeability and low-loss sub-1μm magnetic particles'composite core,and a developed 0.18-μm CMOS-compatible device fabrication process.An equivalent circuit model with structural amplifying factors is proposed and modeled.The prototype of the 6-level stacked inductor with Co_(2)Z magnetic-particles-composite-medium filling increases the inductance L by 50%,and quality factor Q by 37%at frequencies as high as 1 GHz,with high inductance density as 825 nH/mm2 and a reduced size area by 80%compared to the planar spiral inductor.

关 键 词：INDUCTOR composite FILLED 

分 类 号：TN7[电子电信—电路与系统]