Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model  

作　　者：DAI Zhong-Ling WANG You-Nian 戴忠玲;王友年(School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116023)

机构地区：[1]School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116023

出　　处：《Chinese Physics Letters》2011年第7期210-213,共4页中国物理快报（英文版）

基　　金：by the National Natural Science Foundation of China under Grant Nos 11075029 and 10975030;the Important National Science and Technology Specific Project under Grant No 2011ZX02403-001.

摘　　要：A fluid radio-frequency(rf)sheath model coupled to an equivalent circuit method is adopted to describe the nonlinear series resonance effects due to nonlinear interaction of plasma bulk and sheath in asymmetric capacitive discharges.With the fluid sheath model,we can determine self-consistently the relationship between the instantaneous potential drop across the rf sheath and the instantaneous sheath thickness.The numerical results demonstrate that the self-excitation of the plasma series resonance significantly enhances both ohmic heating and stochastic heating.Also,we observe that the effects of nonlinear series resonance increases the total power dissipation by factors of 2–5 for low pressure capacitive plasmas.Furthermore,we find that the largest harmonic is about 13 for the plasma current.

关 键 词：NONLINEAR instantaneous ELECTRON 

分 类 号：O53[理学—等离子体物理]