应用于环形激光束的低阶哈特曼波前传感器设计  

Design of low-order Hartmann-Shack wavefront sensor for annular laser beam

作　　者：冯亚飞 韦承甫[1] 刘现魁[1] 任晓明[1] 王振华[1] 孟昭荣[1] Feng Yafei;Wei Chengfu;Liu Xiankui;Ren Xiaoming;Wang Zhenhua;Meng Zhaorong(The 718 Research Institute,China State Shipbuilding Corporation Limited,Handan 056027,China)

机构地区：[1]中国船舶重工集团公司第七一八研究所,河北邯郸056027

出　　处：《红外与激光工程》2021年第7期194-199,共6页Infrared and Laser Engineering

基　　金：国家高技术发展计划(51326010201)。

摘　　要：针对高能化学激光器出光过程中存在着大比例、大PV值低阶像差这一现象,设计了专用于前5项Zernike像差检测的低阶哈特曼波前传感器。该传感器的透镜部分采用呈环形分布的6单元微透镜阵列与凸透镜组合的方法,且均用CaF2材料制作。该方法不仅可以同时用于可见光和红外光的低阶像差测量,还具有成本低、光路结构简单、探测范围大等优点,适用于环形激光束的大PV值低阶像差检测。之后还搭建了测试光路系统,测试结果表明,该低阶哈特曼波前传感器的波面测量PV值量程为±8λ(λ=3.39μm),测量精度优于λ/10 (λ=3.39μm)。Based on the fact that there were a large percentage of low-order aberrations which had large PV values in high-energy laser beam,a Hartmann-Shack wavefront sensor for measuring first five-order Zernike aberrations was presented and designed.The lens part of the sensor adopted a method with combination of a 6-units micro-lens array and a convex lens,and the micro-lens array was distributed in annular.Since the lens material of this sensor was GaF2,the designed sensor could be applied to the low-order aberrations measurement of visible and infrared laser beam.This method had the advantages of low cost,simple structure and large detection range,which was suitable for the measurement of large PV-value low-order aberrations of the annular laser beam.Afterwards,a measurement system for the low-order Hartmann-Shack wavefront sensor had been set up,and the results show that the measuring range was±8λ(λ=3.39μm)and the accuracy was less thanλ/10(λ=3.39μm).

关 键 词：哈特曼波前传感器 低阶像差 高能激光 波前畸变 

分 类 号：TN247[电子电信—物理电子学]