Optical and Mechanical Properties of Transparent Conductive Al-Doped ZnO Films Deposited by the Sputtering Method  

作　　者：ZHU Yun WANG Yue WAN Peng-Fei LI Hong-Yu WANG Shou-Yu 竺云;王越;宛鹏菲;李洪玉;王守宇(College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387)

机构地区：[1]College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387

出　　处：《Chinese Physics Letters》2012年第3期231-234,共4页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant No 51001081;the Introduction of Talent Foundation of Tianjin Normal University under Grant No 5RL075;the Science and Technology Development Fund Planning Project of Tianjin Colleges and Universities under Grant No 20081101.

摘　　要：Al-doped ZnO transparent conductive oxide thin films(AZO)are prepared by the magnetron sputtering method.The structural,optical and mechanical properties of the AZO films are studied systematically.The average haze of the AZO sample is increased from 0.34%to 23.6%through wet etching treatment between 380 and 1100nm,and the etched AZO sample has a higher average transmittance of about 82.3%in infrared wavelength range from 760 to 1100nm due to the reduction of absorption by carriers.The average hardness and elastic modulus of the as-deposited AZO films,as determined using the nanoindentation technique,are approximately 10.2 GPa and 130 GPa,respectively.The critical fracture load related to the adhesion strength is about 91 mN.The optimized optical and electrical properties and referable mechanical data indicate that AZO films have good prospects for commercial applications.

关 键 词：FILMS TRANSPARENT MODULUS 

分 类 号：TB3[一般工业技术—材料科学与工程]