Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography  

作　　者：LI Yi-Gui YANG Chun-Sheng LIU Jing-Quan SUGIYAMA Susumu 李以贵;杨春生;刘景全;杉山进(Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai 200240;Global Innovation Research Center,Ritsumeikan University,Kusatsu,Shiga 525-8577,Japan)

机构地区：[1]Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai 200240 [2]Global Innovation Research Center,Ritsumeikan University,Kusatsu,Shiga 525-8577,Japan

出　　处：《Chinese Physics Letters》2011年第3期215-217,共3页中国物理快报（英文版）

基　　金：Supported by the Shanghai Pujiang Talent Plan Sponsorship(No 09PJ1406200);the International Cooperation Project from the Ministry of Science and Technology of China(2009DFB10330);Aviation Key Laboratory Foundation of China(No 20080857002);and National Natural Science Foundation of China under Grant Nos 60777016,50775149 and 60976081.

摘　　要：Polymer materials such as transparent thermoplastic poly(methyl methacrylate)(PMMA)have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process.We fabricated PMMA-based polymer hollow microneedle arrays by maskdragging and aligning x-ray lithography.Techniques for 3D micromachining by direct lithography using x-rays are developed.These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask.The mask is imaged onto the PMMA sample.A pattern with an area of up to 100×100 mm^(2)can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask.The fabrication technology has several advantages,such as forming complex 3D micro structures,high throughput and low cost.

关 键 词：process PROJECTION TRANSPARENT 

分 类 号：O63[理学—高分子化学]