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作 者:ZHANG Jianhua LIU Jiarui LI Yi 张建华;刘家瑞;李毅(Institute of Physics,Academia Sinica,Beijing;Tianjing Normal University,Tianjing)
机构地区:[1]Institute of Physics,Academia Sinica,Beijing [2]Tianjing Normal University,Tianjing
出 处:《Chinese Physics Letters》1989年第5期205-208,共4页中国物理快报(英文版)
摘 要:The interactions between incident particles and solids in ion implantation have been discussed,basing on the generalized Langevin theory.Considering anharmonic effects of interactions among lattice atoms,we calculated numerically the nuclear stopping power and the distribution of projected ranges,which are in agreement with the results of the program TRIM-88 in the low-energy limit.
关 键 词:theory. IMPLANTATION SOLIDS
分 类 号:O57[理学—粒子物理与原子核物理]
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