Integrated thin film lithium niobate Fabry–Perot modulator[Invited]  

作　　者：Mengyue Xu Mingbo He Yuntao Zhu Lin Liu Lifeng Chen Siyuan Yu Xinlun Cai 徐梦玥;何名博;朱运涛;刘林;陈立峰;余思远;蔡鑫伦(State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510000,China)

机构地区：[1]State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510000,China

出　　处：《Chinese Optics Letters》2021年第6期8-12,共5页中国光学快报（英文版）

基　　金：partially supported by the National Key R&D Program of China(Nos.2019YFA0705000 and 2019YFB1803900);the National Natural Science Foundation of China(Nos.11690031 and 11761131001);the Key R&D Program of Guangdong Province(No.2018B030329001);the Local Innovative and Research Teams Project of Guangdong Pearl River Talents Program(No.2017BT01X121);the Innovation Fund of WNLO(No.2018WNLOKF010);the Project of Key Laboratory of Radar Imaging and Microwave Photonics,Ministry of Education(No.RIMP2019003)。

摘　　要：Integrated traveling-wave lithium niobate modulators need relatively large device lengths to achieve low drive voltage. To increase modulation efficiency within a compact footprint, we report an integrated Fabry–Perot-type electro-optic thin film lithium niobate on insulator modulator comprising a phase modulation region sandwiched between two distributed Bragg reflectors. The device exhibits low optical loss and a high tuning efficiency of 15.7 pm/V. We also confirm the modulator's high-speed modulation performance by non-return-to-zero modulation with a data rate up to 56 Gbit/s.

关 键 词：integrated optic devices lithium niobate optical modulators microstructure fabrication 

分 类 号：TN761[电子电信—电路与系统] TN256