Locally periodically poled LNOI ridge waveguide for second harmonic generation [Invited]  

作　　者：Biao Mu Xianfang Wu Yunfei Niu Yan Chen Xinlun Cai Yanxiao Gong Zhenda Xie Xiaopeng Hu Shining Zhu 沐彪;吴先方;钮云飞;陈琰;蔡鑫伦;龚彦晓;谢臻达;胡小鹏;祝世宁(National Laboratory of Solid State Microstructures,College of Engineering and Applied Sciences,College of Electronic Science and Engineering,and School of Physics,Nanjing University,Nanjing 210093,China;State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,China)

机构地区：[1]National Laboratory of Solid State Microstructures,College of Engineering and Applied Sciences,College of Electronic Science and Engineering,and School of Physics,Nanjing University,Nanjing 210093,China [2]State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,China

出　　处：《Chinese Optics Letters》2021年第6期28-32,共5页中国光学快报（英文版）

基　　金：supported by the National Key R&D Program of China(Nos.2019YFA0705000 and 2017YFA0303700);the National Natural Science Foundation of China(Nos.91950206,11627810,and 51890861);the Leading-edge Technology Program of Jiangsu Natural Science Foundation(No.BK20192001);the Key R&D Program of Guangdong Province(No.2018B030329001);the Fundamental Research Funds for the Central Universities(No.021314380177)。

摘　　要：Periodically poled lithium niobate on insulator(LNOI) ridge waveguides are desirable for high-efficiency nonlinear frequency conversions, and the fabrication process of such waveguides is crucial for device performance. In this work, we report fabrication and characterization of locally periodically poled ridge waveguides. Ridge waveguides were fabricated by dry etching, and then the high-voltage pulses were applied to locally poled ridge waveguides. Second harmonic generation with normalized conversion efficiency of 435.5% W^(-1)·cm^(-2) was obtained in the periodically poled LNOI ridge waveguide,which was consistent with the triangular domain structure revealed by confocal microscopy.

关 键 词：lithium niobate on insulator ridge waveguide ferroelectric domain inversion second harmonic generation 

分 类 号：TQ131.11[化学工程—无机化工] TN25[电子电信—物理电子学]