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作 者:Qiang Luo Chen Yang Zhenzhong Hao Ru Zhang Dahuai Zheng Fang Bo Yongfa Kong Guoquan Zhang Jingjun Xu 罗强;杨晨;郝振中;张茹;郑大怀;薄方;孔勇发;张国权;许京军(MOE Key Laboratory of Weak-Light Nonlinear Photonics,TEDA Institute of Applied Physics and School of Physics,Nankai University,Tianjin 300457,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China;Collaborative Innovation Center of Light Manipulations and Applications,Shandong Normal University,Jinan 250358,China)
机构地区:[1]MOE Key Laboratory of Weak-Light Nonlinear Photonics,TEDA Institute of Applied Physics and School of Physics,Nankai University,Tianjin 300457,China [2]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China [3]Collaborative Innovation Center of Light Manipulations and Applications,Shandong Normal University,Jinan 250358,China
出 处:《Chinese Optics Letters》2021年第6期33-37,共5页中国光学快报(英文版)
基 金:supported by the National Key Research and Development Program of China(No.2019YFA0705000);the National Natural Science Foundation of China(Nos.12034010,11734009,92050111,92050114,12074199,12004197,and 11774182);the Higher Education Discipline Innovation Project(No.B07013);the Program for Changjiang Scholars and Innovative Research Team in University(PCSIRT)(No.IRT_13R29)。
摘 要:Lithium niobate on insulator(LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication of on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 d B/cm in the communication band was achieved in the fabricated waveguide amplifiers under the pump of a974 nm continuous laser. This work develops new active devices on LNOI and may promote the development of LNOI integrated photonics.
关 键 词:lithium niobate lithium niobate on insulator AMPLIFIER integrated optics
分 类 号:TQ131.11[化学工程—无机化工] TN722[电子电信—电路与系统]
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