基于散射场分布拟合逼近的表面缺陷检测  

Surface Defect Detection Based on Scattering Field Distribution Fitting Approximation

作　　者：武雄骁 王红军 魏晨 田爱玲 刘丙才 朱学亮 刘卫国 Wu Xiongxiao;Wang Hongjun;Wei Chen;Tian Ailing;Liu Bingcai;Zhu Xueliang;Liu Weiguo(Shaanxi Province Key Laboratory of Membrane Technology and Optical Test,School of Optoelectronic Engineering,Xi’an Technological University,Xi’an,Shaanxi 710021,China)

机构地区：[1]西安工业大学光电工程学院陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《激光与光电子学进展》2021年第11期183-189,共7页Laser & Optoelectronics Progress

基　　金：陕西省自然科学基础研究计划(2019JM-373)。

摘　　要：为了实现对光学元件表面不同尺寸尤其是微小尺寸缺陷的精确检测,以典型的光学元件表面缺陷即麻点和划痕为研究目标,提出了一种基于散射场分布拟合逼近的表面缺陷检测方法。实验结果表明,本方法可以对光学元件表面的微小尺寸缺陷进行快速有效的检测,且拟合计算结果与样件原始尺寸的相对误差基本小于5%,验证了本方法的有效性。此外,本方法还解决了现有测量方法精度低、结构复杂的问题,为精确检测光学元件表面的微小尺寸缺陷提供了新思路。This study proposes a surface defect detection method based on the scattering field distribution fitting approximation to accurately detect different sizes of optical element surfaces, especially small-size defects, with typical optical element surface defects-pits and scratches-as the research target. Experimental results show that the method can rapidly and effectively detect small-size defects on optical element surfaces and the relative error between fitting calculation results and the original size of a sample is basically less than 5%, which verifies the effectiveness of the method. In addition, the method addresses the problems of low accuracy and complex structure of existing measurement methods and introduces a new idea for accurately detecting microsized defects on optical element surfaces.

关 键 词：测量与计量 缺陷检测 散射 表面缺陷 精密光学元件 

分 类 号：TH741[机械工程—光学工程]