基于激光自混合测振的FSI测距误差补偿方法  

FSI Ranging Error Compensation Method Based on Laser Self-Mixing Vibration Measurement

作　　者：柴晓博 吴腾飞[1] 殷璞芙 Chai Xiaobo;Wu Tengfei;Yin Pufu(State Key Laboratory of Precision Measurement Technology and Instruments,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《激光与光电子学进展》2021年第11期198-204,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61733012)。

摘　　要：在激光扫频干涉测距过程中,目标振动在测距干涉信号中引入了多普勒频移,造成信号频谱展宽,导致了测距误差放大效应。为了降低振动对测距结果的影响,提出了基于激光自混合测振的测距误差补偿方法,通过同步测量自混合干涉信号的相位变化,补偿目标振动对测距干涉信号的相位调制,并采用频率重采样法校正激光器的调频非线性。最终通过仿真和实验验证了所提方法的可行性。在实验中,当测量的目标振幅为7102.1 nm时,测振标准差为7.9 nm,补偿前的测距标准差为3270.6μm,补偿后的测距标准差降低到21.4μm。补偿后的测距标准差接近无振动情况下的测距标准差,表明目标振动引发的测距误差放大问题得到了有效解决。In the process of laser frequency scanning interferometry ranging,the target vibration introduces Doppler shift in the ranging interference signals which results in the spectral broadening of the signal and the amplification effect of ranging errors.To reduce the effect of vibration on ranging results,we proposed a ranging error compensation method based on laser self-mixing vibration measurement.This method compensates the phase modulation of the target vibration on the ranging interference signal by synchronously measuring the phase change of the self-mixing interference signal,and meanwhile the frequency resampling method is used to correct the laser frequency modulation nonlinearity.Finally,the feasibility of the proposed method is verified by simulation and experiment.In the experiment,when the measured target amplitude was 7102.1 nm,the measured vibration standard deviation was 7.9 nm,the range measurement standard deviation before compensation was 3270.6μm,and the range measurement standard deviation after compensation was reduced to 21.4μm,which was close to the case of no vibration,indicating that the amplification problem of ranging errors caused by target vibration was effectively solved.

关 键 词：测量 激光扫频干涉测距 激光自混合干涉 目标振动补偿 频率重采样 

分 类 号：TN249[电子电信—物理电子学]