基于等厚干涉的拼接镜面边缘传感器研究  

Segmented Mirror Edge Sensors Based on Equal Thickness Interference

作　　者：左恒[1,2] 张茜 张勇 Zuo Heng;Zhang Xi;Zhang Yong(Nanjing Institute of Astronomical Optics&Technology,National Astronomical Observatories,Chinese Academy of Sciences,Nanjing,Jiangsu 210042,China;Key Laboratory of Astronomical Optics&Technology,Nanjing Institute of Astronomical Optics&Technology,Chinese Academy of Sciences,Nanjing,Jiangsu 210042,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院国家天文台南京天文光学技术研究所,江苏南京210042 [2]中国科学院天文光学技术重点实验室(南京天文光学技术研究所),江苏南京210042 [3]中国科学院大学,北京100049

出　　处：《光学学报》2021年第12期109-116,共8页Acta Optica Sinica

基　　金：国家自然科学基金天文联合基金重点项目(U2031207);国家自然科学基金(U1931126、12073053);中国科学院青年创新促进会(2013041)。

摘　　要：拼接镜面共相技术是大口径望远镜研制中的关键技术之一,共相精度主要取决于边缘传感器的测量精度。针对大口径拼接镜面望远镜的共相需求,提出一种基于光学等厚干涉原理的边缘传感器设计方案,阐述其基本原理并给出该边缘传感器的结构图。利用数据拟合和图像处理方法,对该方案进行仿真模拟,仿真结果显示该方案的测量精度可以达到倾斜误差为0.02″,平移误差为20 nm,可以满足大口径拼接镜面望远镜的共相检测需求。Segmented mirror co-phasing is one of the key techniques in the development of large-aperture telescopes,and its accuracy mainly depends on the measurement accuracy of the edge sensors.Aiming at the co-phasing requirement of large-aperture segmented mirror telescopes,we proposed the design scheme of an edge sensor based on equal thickness interference.Then,the basic principle was expounded and the structure diagram of the edge sensor was provided.Furthermore,data fitting and image processing were applied to the scheme simulation.The results show that the measurement accuracy of this scheme can reach a tilt/tip error of 0.02″and a piston error of 20 nm,meeting the co-phasing detection requirements of large-aperture segmented mirror telescopes.

关 键 词：光学器件 边缘传感器 图像处理 拼接镜面 子镜共相 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]