Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes  

作　　者：FENG Zhao-Bin LIU Duo 冯兆斌;刘铎(State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100)

机构地区：[1]State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100

出　　处：《Chinese Physics Letters》2013年第10期42-45,共4页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant No 60974117.

摘　　要：We achieve enhanced actuation of the 2^(nd)-order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration.A torque about the static point of the 2^(nd) eigenmode is generated in this configuration and therefore enables effective actuation of the 2^(nd)-order resonance.It is further confirmed that the torque has the effect of suppressing the 1^(st)-order resonance.As a result,the frequency response curve of the microcantilever beam can be modulated.Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.

关 键 词：CANTILEVER planar RATIONAL 

分 类 号：O17[理学—数学]