Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma  

作　　者：YANG Yun WU Han-ming 

机构地区：[1]Institute of Mechanics,Chinese Academy of Sciences,Beijing 100080

出　　处：《Chinese Physics Letters》1996年第6期447-450,共4页中国物理快报（英文版）

基　　金：Supported by the Foundation of Chinese Academy of Sciences。

摘　　要：Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources,a self-consistent electron kinetic model is developed.The electron distribution function,spatial distributions of the electron density and ionization rate are calculated and discussed.

关 键 词：ELECTRON INHOMOGENEOUS spatially 

分 类 号：O17[理学—数学]