Measurements of Film Thickness and Growth Temperature of YBa_(2)Cu_(3)O_(7-δ) Films by Pyrometric Absorption Method  

作　　者：XIONG Xu-ming ZHOU Yue-liang WANG Hui-sheng CUI Da-fu LU Hui-bin CHEN Zheng-hao YANG Guo-zhen 熊旭明;周岳亮;王会生;崔大复;吕惠斌;陈正豪;杨国桢(Optical Physics Laboratory,Institute of Physics,Chinese Academy of Sciences,Beijing 100080)

机构地区：[1]Optical Physics Laboratory,Institute of Physics,Chinese Academy of Sciences,Beijing 100080

出　　处：《Chinese Physics Letters》1997年第5期367-370,共4页中国物理快报（英文版）

基　　金：Supported by the National Centre for Research and Development on Superconductor of China.

摘　　要：A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa_(2)Cu_(3)O_(7-δ)film growth.This method makes use of the temperature difference between the heater and the substrate.By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured,it is possible to monitor the film thickness and the film surface temperature during deposition.Experimental results show that this is a simple and practicable method.

关 键 词：deposition. FILM ABSORPTION 

分 类 号：TB3[一般工业技术—材料科学与工程]