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作 者:WANG Yi-Nan LIU Yue LIN Guo-Qiang 王一男;刘悦;林国强(Key Laboratory of Materials Modification by Laser,Electron,and Ion Beams(Ministry of Education),School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024)
出 处:《Chinese Physics Letters》2013年第3期100-103,共4页中国物理快报(英文版)
基 金:Supported by the National Natural Science Foundation of China under Grant Nos 11075030,11105065,11275041;the National Basic Research Program of China under Grant Nos 2008CB717801,2008CB787103,2009GB105004,2010GB106002;the Fundamental Research Funds for the Central Universities of China under Grant Nos DUT12ZD(G)01,DUT12ZD201.
摘 要:The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model.The model consists of equations of particle continuity,Poisson's equation,and the electron energy equation.The effect of the concentrations of O_(2) in N_(2) on the discharge characteristics is analyzed.The results show that when the concentration of O_(2) in N_(2) is less than 12%,as the amount of O_(2) grows,the electron density and the N4+ion density decrease;the main negative particles are electrons.When the concentration of O_(2) in N_(2) is greater than 12%,the electron density and the N_(4)^(+) ion density increase with the increasing admixture of oxygen;the main negative particle is the O^(-) ion.Moreover,the O^(-) ion density,the O_(2)^(+) ion density,the electron temperature and the mixture gases electronegativity increase with growth of O_(2) in the range from 4%to 20%and with density of O_(2) in N_(2).
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