显示面板制造过程中氢氟醚(HFE)废气处理技术及应用  

The Technology and Its Application of HFE Waste Gas Treatment in Display Panel Manufacturing Process

作　　者：陈畅 Chen Chang(Shanghai Zaga Environment Technology Co.,Ltd.,Shanghai 201600)

机构地区：[1]上海展嘉环境科技有限公司,上海201600

出　　处：《上海环境科学》2021年第4期181-184,共4页Shanghai Environmental Sciences

摘　　要：介绍了氟系清洗剂的特点及其在显示面板制造过程中的应用。针对某面板生产企业排放的大风量、低浓度的HFE废气,采用“RTO焚烧系统+急冷塔+碱液喷淋塔”的处理系统进行净化处理,通过对比处理前后的污染物排放浓度及排放速率可知,该组合净化工艺处理后的效率超过95%,满足相关排放标准。The characteristics of fluorine series detergent and its application in the manufacturing process of display panel were introduced.A cleaning process of“RTO incineration system+quench tower+alkali liquor spray column”was adopted to treat the exhaust containing hydrofluoroether(HFE)with low concentration and huge air volume in a display panel manufacturing enterprise.Treatment efficiency of the combined cleaning process was over 95%so as to satisfy the relevant emission standard.

关 键 词：氟系清洁剂 氢氟醚 废气处理 

分 类 号：X70[环境科学与工程—环境工程]