X射线光电子能谱仪的数据采集及处理技巧  

Data Acquisition and Processing Technique of X-ray Photoelectron Spectrometer

作　　者：范燕 徐昕荣[1] 石志锋[1] 李冰[1] 刘佳[1] 魏强[1] 鲁志龙 孙成军 Fan Yan;Xu Xinrong;Shi Zhifeng;Li Bing;Liu Jia;Wei Qiang;Lu Zhilong;Sun Chengjun(Medical Devices Research&Testing Center of South China University of Technology,Guangzhou,510006)

机构地区：[1]华南理工大学医疗器械研究检验中心,广州510006

出　　处：《化学通报》2021年第8期857-863,共7页Chemistry

基　　金：国家自然科学基金项目(U1609219)资助。

摘　　要：X射线光电子能谱(XPS)广泛应用于材料表面分析表征。在XPS分析过程中,对于经验不足的科研或者测试人员可能会引入一些主观性的判断,使得谱图测试及分析对数据分析质量产生影响。为获得更好的数据质量,本文根据国际标准和实际测试经验总结出一种通用于不同类型材料表面分析表征的XPS数据采集和处理分析思路,以方便测试人员能够更加系统的进行数据采集和分析,为材料研发人员提供更加全面的元素组成信息和谱图解析注意事项,从而更有效地助力材料表面分析研究,该方法对科研工作者分析准确度的提高具有重要的理论意义和实际应用价值。X-ray photoelectron spectroscopy(XPS)is widely used in the characterization of material surface.Due to the introduction of subjective judgments,the level of testing technology and analysis will have an impact on the quality of final result.According to the international standard and practical testing experience,this paper summarizes an idea of XPS data acquisition and processing analysis,so as to facilitate testers to collect and analyze data more systematically.This method provides researchers with more comprehensive information on the composition of elements and considerations for spectrum analysis,thus facilitating the surface analysis of materials more effectively.It has important theoretical significance and practical application value for improving the analysis accuracy of researchers.

关 键 词：XPS 数据采集 数据处理 

分 类 号：TH842[机械工程—仪器科学与技术]