基于MMI的聚合物1×16光功分器的设计及飞秒激光制备  

Design and fabrication of femtosecond laser for polymer 1×16 optical splitter based on MMI

作　　者：余鑫 周舟 Yu Xin;Zhou Zhou(School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,China)

机构地区：[1]湖北工业大学机械工程学院,湖北武汉430068

出　　处：《长江信息通信》2021年第6期18-21,共4页Changjiang Information & Communications

摘　　要：高传输损耗和器件尺寸是限制光通信系统性能的关键问题,为此以光束传播法(BPM)设计仿真、利用飞秒超快加工技术制备了基于多模干涉耦合器(MMI)的聚合物1×16光功分器,器件尺寸小于22000μm。仿真结果表明平均插入损耗小于23dB,均匀性1.27dB。测试在1550nm波段,1×16光功分器平均插入损耗小于23dB,均匀性1.48dB。基于SU8胶材料仿真了用于光电电路板垂直耦合的光波导结构,利用时域有限差分法(FDTD)分析空间位置偏差对光纤与45°微反射镜的耦合效率影响,得到最佳耦合位置和最大耦合效率86.1%。结果表明器件具有易制备,较低的制备容差敏感度和结构紧凑的优点,符合光电集成和批量生产要求,对光分路器的设计和生产工艺有一定的参考价值。High transmission loss and device size are the key problems that limit the performance of optical communication system.Therefore, a polymer 1×16 optical power divider based on multimode interference coupler(MMI) is designed and fabricated by using beam propagation method(BPM) and femtosecond ultrafast fabrication technology. The device size is less than 22000 μm.The simulation results show that the average insertion loss is less than 23dB and the uniformity is 1.27db. The average insertion loss and uniformity of 1×16 optical power divider are less than 23dB and 1.48db at 1550nm. The optical waveguide structure used for vertical coupling of optoelectronic circuit board is simulated based on SU8 photoresist. The influence of spatial position deviation on the coupling efficiency of optical fiber and 45° micro mirror is analyzed by using finite difference time domain(FDTD).The optimal coupling position and maximum coupling efficiency of 86.1% are obtained. The results show that the device has the advantages of easy fabrication, low fabrication tolerance sensitivity and compact structure. It meets the requirements of optoelectronic integration and mass production. It has a certain reference value for the design and production process of optical splitter.

关 键 词：多模干涉耦合器 光功分器 飞秒激光 垂直耦合 光电电路板 

分 类 号：TN256[电子电信—物理电子学]