基于二次调制的高精度多圈绝对式时栅角位移传感器  

High-precision multi-turn absolute time-grating angular displacement sensor based on re-modulation scheme

作　　者：刘小康[1] 柳康 蒲红吉[1] 于治成 彭凯[1] Liu Xiaokang;Liu Kang;Pu Hongji;Yu Zhicheng;Peng Kai(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《仪器仪表学报》2021年第5期90-98,共9页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51935004);重庆市教委科学技术研究项目(KJQN202001133);“成渝地区双城经济圈建设”科技创新项目(KJCX2020043)资助。

摘　　要：提出了一种基于二次调制的高精度多圈绝对式时栅角位移传感器,该传感器由单圈绝对式传感器与多圈计数模块组成。首先,采用两级单排式时栅角位移传感器构成单圈绝对式传感器,通过第一级传感器构建四路正交的行波信号,将差动的两路行波信号直接反射,作为精测信号;同时,利用第一级四路正交的行波信号作为第二级传感器的激励信号进行二次调制,获得整周单周期信号,作为粗测信号,精测信号结合粗测信号实现高精度单圈绝对式角位移测量。在此基础上,结合韦根多圈计数模块记录圈数信息,从而实现高精度多圈绝对式角位移测量。通过印制电路板技术制作了原理样机,搭建了实验平台,并进行了测试,实验结果表明:该传感器在整周范围原始精度可达±8″,并且在上电、断电情况下实现了圈数的准确记忆。Presents a high precision multi-turn absolute time-grating angular displacement sensor,which is based on the re-modulation scheme.The sensor consists of a single-turn absolute sensor and a multi-turn counting module.Firstly,a two-stage single row timegrating angular displacement sensor is used to form a single-turn absolute sensor.Four orthogonal traveling wave signals are constructed through the first stage sensor.And two differential traveling wave signals are directly reflected as precise measurement signals.Meanwhile,the first four orthogonal traveling wave signal is utilized as the excitation signal of the second sensor for re-modulation to achieve the whole cycle single cycle signal,which is used as the rough measurement signal.The precise measurement signal is combined with the rough measurement signal to realize the high-precision single-turn absolute angular displacement measurement.On this basis,combined with Wiegand multi-turn counting module to record the turn number information,high-precision multi-turn absolute angular displacement measurement is realized.The principle prototype is made by PCB technology.The experimental platform is established,and the experiment is carried out.Experimental results show that the original accuracy of the sensor in the whole cycle range can reach±8″.And the accurate memory of the number of turns is realized in the case of power on and power off.

关 键 词：二次调制 多圈绝对式 时栅 角位移传感器 

分 类 号：TH712[机械工程—测试计量技术及仪器]