柱面微透镜阵列的精密磨削  

Precision grinding of cylindrical microlens array

作　　者：叶震 姚鹏 于世孟[1,2] 张仙朋 黄传真 YE Zhen;YAO Peng;YU Shi-meng;ZHANG Xian-peng;HUANG Chuan-zhen(Center for Advanced Jet Engineering Technologies,School of Mechanical Engineering,Shandong University,Jinan 250061,China;Key Laboratory of High Efficiency and Clean Mechanical Manufacture of the Ministry of Education,Jinan 250061,China)

机构地区：[1]山东大学机械工程学院先进射流工程技术研究中心,山东济南250061 [2]高效洁净机械制造教育部重点实验室,山东济南250061

出　　处：《光学精密工程》2021年第7期1567-1579,共13页Optics and Precision Engineering

基　　金：国家自然科学基金面上项目(No.51875321);山东省自然科学基金资助项目(No.ZR2018MEE019);山东省自然科学基金重大基础研究(No.ZR2018ZB0521)。

摘　　要：柱面微透镜阵列的加工精度要求高,加工效率低,采用具有微细轮廓结构的成形砂轮进行磨削加工能够极大地提高加工效率。为了预测成形砂轮磨削工件的面形误差和表面粗糙度,建立了成形砂轮磨削仿真模型。通过滤波方法分析和模拟微细结构成形砂轮的磨粒突出高度的偏态分布特征,结合实测的砂轮的轮廓形状和跳动完成了整体的空间砂轮的重构,同时建立了砂轮表面磨粒的磨削运动学模型,模拟出工件磨削加工后的表面形貌。最后,开展磨削实验验证了仿真模型的有效性。对比仿真与实验结果可知,面形误差PV值的偏差为5.78%,Ra值的偏差为17.3%,Rz值的偏差为12.9%。该磨削仿真模型能有效预测磨削表面的面形误差和表面粗糙度。The machining precision of a cylindrical microlens array is usually very high,whereas the pro⁃cessing efficiency is very low.However,the processing efficiency can be considerably improved using a profile grinding wheel with a fine profile structure.To predict the surface shape error and surface rough⁃ness of a workpiece machined using a profile grinding wheel,a grinding simulation model was built for the profile grinding wheel.Then,the skewness distribution characteristics of the protrusion height of grains in the profile grinding wheel surface with a fine structure were analyzed and simulated using the filtering meth⁃od.Subsequently,combining the outline of the grinding wheel topography and the run-out error of the grinding wheel,the entire grinding wheel in the space was reconstructed.Thereafter,a kinematics model of abrasive grains in the grinding wheel surface was created to simulate the surface topography of the grind⁃ing workpiece.Finally,a grinding experiment was conducted to verify the effectiveness of the simulation model.Relative to the experimental results,the errors in the PV,Ra,and Rz values of the simulated sur⁃face were 5.78%,17.3%,and 12.9%,respectively.The proposed grinding simulation model can effec⁃tively predict surface shape errors and the roughness of grinding surfaces.

关 键 词：精密磨削 柱面微透镜阵列 磨削表面仿真 砂轮建模 成形砂轮 

分 类 号：TH161[机械工程—机械制造及自动化]