悬丝摆式加速度计摆组件自动装配系统  

Automatic assembly system for pendulum components of wire suspended pendulum accelerometer

作　　者：任同群[1,2] 钱志龙 徐龙 王晓东[1,2] REN Tong-qun;QIAN Zhi-long;XU Long;WANG Xiao-dong(Key Laboratory for Precision&Non-traditional Machining of the Ministry of Education,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China;Shaanxi Baocheng Aviation Instrument Co.LTD,BaoJi 721006,China)

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024 [2]大连理工大学微纳米技术及系统辽宁省重点实验室,辽宁大连116024 [3]陕西宝成航空仪表有限责任公司,陕西宝鸡721006

出　　处：《光学精密工程》2021年第7期1609-1619,共11页Optics and Precision Engineering

基　　金：国家重点研发计划(No.2019YFB1310901);中央高校基本科研业务费资助(No.DUT20LAB109);辽宁省自然科学基金项目(No.2020-MS-104)。

摘　　要：摆组件是微型悬丝摆式加速度计的核心部分,其装配精度直接影响加速度计的测量准确性。为此,开发了一台摆组件自动装配设备。设计了上下固定式和可拆装式工装夹具,摆组件通过可拆装夹具安装在对应的固定夹具上。由步进直线电机驱动穿丝夹钳实现悬丝相对于玻璃管的穿入,并由微力传感器控制张紧力。真空吸附装置集成于三维运动平台构成上装调模块,实现上工装拾取、搬运和定位。锁紧装置集成于电动转台构成下装调模块,实现下工装的固定与姿态调整。通过上下工装夹具的对齐及合体,实现最终装配。装配过程中借助反射棱镜,由单相机实现立体视觉测量功能。实验数据表明,装配位置精度小于15µm,平行度小于15µm,满足自动装配设备的稳定可靠、装配精度高等要求。Pendulum components are the key parts of a miniature wire-suspended pendulum accelerome⁃ter.The accuracy of the assembly directly affects the measurement accuracy of the accelerometer.An as⁃sembly equipment for pendulum components is developed in this study.In this equipment,the upper and lower constant fixtures and removable fixtures are designed.The pendulum components are fixed on corre⁃sponding constant fixtures through the respective removable fixtures.A linear stepper motor is used to drive a clamp to thread the suspension wire through glass tubes,where the tension of the suspension wire is controlled by a micro-force sensor mounted on the clamp.A vacuum adsorption mechanism is integrated into a 3-D precision motion platform to form the upper operation module.It realizes the picking up,move⁃ment,and positioning of the upper fixture.A locking device is integrated into a rotating platform to form the lower operation module.It realizes the fixing and posture adjustment of the lower fixture.After sus⁃pension wire threading,the final assembly is achieved through the alignment and combination of the two constant fixtures.During the assembly process,a single camera is set as a stereo vision system via a re⁃flecting prism.Experimental results show that the positioning and parallelism errors of assembly parts are all less than 15µm.It can meet the requirements of stability,reliability,and high precision of automatic assembly equipment.

关 键 词：摆组件 微型悬线摆式加速度计 装配设备 玻璃管 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置] TB92[自动化与计算机技术—控制科学与工程]