埋栅TCO薄膜的制备及在太阳电池上的应用  

FABRICATION OF TCO STACK FILMS WITH EMBEDDING METAL GRID AND APPLYING ON HETEROJUNCTION SOLAR CELLS

作　　者：王文贤 蔡伦 陈涛 俞健 黄跃龙 沈辉[2] Wang Wenxian;Cai Lun;Chen Tao;Yu Jian;Huang Yuelong;Shen Hui(Institute of Photovoltaics,Southwest Petroleum University,Chengdu 610500,China;Institute for Solar Energy Systems,Sun Yat-sen University,Guangzhou 510006,China)

机构地区：[1]西南石油大学光伏产业技术研究院,成都610500 [2]中山大学太阳能系统研究所,广州510006

出　　处：《太阳能学报》2021年第7期125-131,共7页Acta Energiae Solaris Sinica

基　　金：国家自然基金青年科研基金(51702269);国家自然科学基金(61774173)。

摘　　要：提出新型金属埋栅结构来改良透明导电氧化物薄膜(TCO)的光电性能,并分别采用AZO和ITO这2种TCO材料制备和对比3类薄膜(单层TCO薄膜、TCO/金属薄膜/TCO以及TCO/金属栅线/TCO三明治结构的薄膜)的光学和电学性能。本文制备的新型叠层AZO/Mg栅线/AZO和ITO/Ag栅线/ITO结构在300~1200 nm范围内光学透过率保持约在85%,方阻分别降低至1.94和91Ω/□。将ITO/Ag栅线/ITO作为TCO用在n-CdS/p-Si异质结电池上取得了9.31%的效率,相比单层ITO的电池转换效率提高了6.03%。该工作为低方阻、高光学透过率TCO的制备提供了一种行之有效的思路,在光电子器件上也具有一定的应用前景。Transparent conductive oxides(TCOs)thin films with high transmittance and low sheet resistance as windows layer of solar cells play a great role in photon-generated carrier collection and optical antireflection coating.On one hand,the low sheet resistance is a favor for the carrier collection.On the other hand,higher optical transmittance allows more photon get into solar cells to generate more photo-generated current.In this paper,two different kinds of TCOs(AZO and ITO)were successfully fabricated and compared with three TCOs structure(single layer TCO,TCO/metal/TCO,TCO/metal grid/TCO)in both optical and electrical performance.The new novel stack films AZO/Mg grid/AZO and ITO/Ag grid/ITO can not only keep the thin film transmittance at 85%in 300~1200 nm wavelength but also decrease the sheet resistance into 1.94Ω/□and 91Ω/□compare to single TCO layer.At last,the highest efficiency 9.31%of n-CdS/p-Si heterojunction solar cell was obtained by applying the TCO/metal grid/TCO stack layers.

关 键 词：透明导电氧化物 硫化镉太阳电池 半导体异质结器件 ITO/Ag栅线/ITO 掺铝氧化锌(AZO) 

分 类 号：TN304[电子电信—物理电子学]