柔性电子技术中的半导体材料性能调控概述  

Review on property regulation of semiconducting materials in flexible electronics

作　　者：王宙恒 陈颖 郑坤炜 李海成 马寅佶[1,2] 冯雪 Wang Zhou-Heng;Chen Ying;Zheng Kun-Wei;Li Hai-Cheng;Ma Yin-Ji;Feng Xue(Ministry of Education Key Laboratory of Applied Mechanics,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China;Center for Flexible Electronics Technology,Tsinghua University,Beijing 100084,China;Institute of Flexible Electronics Technology of Tsinghua University,Zhejiang,Jiaxing 314000,China;Qiantang Science and Technology Innovation Center,Hangzhou 310016,China)

机构地区：[1]清华大学航天航空学院,应用力学教育部重点实验室,北京100084 [2]清华大学柔性电子技术研究中心,北京100084 [3]浙江清华柔性电子技术研究院,浙江嘉兴314000 [4]钱塘科技创新中心,杭州310016

出　　处：《物理学报》2021年第16期167-181,共15页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:11625207,11902292);浙江省重点研发计划(批准号:2020C05004,2019C05002)资助的课题。

摘　　要：利用柔性电子技术对半导体材料性能调控研究具有重大的科学意义及应用价值.该研究一方面突破了传统应变工程中受限于无机材料硬而脆的特性,且引入应变多为固定值的局限;另一方面也为基于无机功能材料的可延展柔性电子器件在大变形环境下的性能评估提供了理论基础.因此,柔性电子技术为针对半导体材料或其他功能材料的应变调控提供了一种新方法,将有望应用在诸多需要材料性能周期性改变的新颖领域之中.本文将首先简介柔性无机电子技术,并对其中的两大关键技术:基于纳米金刚石颗粒的减薄及转印技术进行重点阐述,并探究两大关键技术对半导体电子器件性能的影响;随后介绍半导体材料近些年在应变-能带结构耦合关系方向的研究成果,并以基于屈曲砷化镓纳米薄膜条带及量子阱结构的研究为例,阐明柔性电子技术运用于半导体材料性能调控的独特优势;最后展望应变调控半导体特性的应用方向与发展前景.Flexible electronics technology plays an important role in regulating the properties of semiconducting materials,leading to the breakthrough in traditional strain engineering that is limited by the rigid and brittle inorganic materials and the fixed strain values.Thereby,the relevant research not only provides a new clue for strain regulation of semiconductor materials or other functional materials,but also lays a theoretical foundation for the performance evaluation of stretchable and flexible electronic devices based on inorganic functional materials in large-deformation environments.In this paper,the research progress of flexible inorganic electronics and strain effects on band structures,especially the property regulation of semiconducting materials in flexible electronics,is reviewed.Firstly,the nano-diamond particles based thinning process and the transfer printing are emphatically expounded with their influence on the properties of semiconducting electronics explored.In addition,the development and application of strain effect on band structure in recent years are introduced.In particular,the strain control based on buckling GaAs nanoribbon and buckling quantum well structure are studied to demonstrate the superior advantage of flexible electronics technology in the property regulation of semiconducting materials.The application and developing trend of strain engineering in the future are prospected finally.

关 键 词：可延展柔性电子 半导体材料性能调控 应变-能带结构耦合关系 屈曲 

分 类 号：TN304[电子电信—物理电子学]