扫描电子显微镜放大倍数示值误差的校准及不确定度评定  

Calibration and Uncertainty Evaluation of Magnification Indication Error of Scanning Electron Microscope

作　　者：韩强[1] 骆彬威 张欣宇[1,2] Han Qiang;Luo Binwei;Zhang Xinyu(Guangdong Institute of Metrology,Guangzhou 510405,China;Guangdong Provincial Key Laboratory of Modem Geometric and Mechanical Metrology Technology,Guangzhou 510405,China)

机构地区：[1]广东省计量科学研究院,广东广州510405 [2]广东省现代几何与力学计量技术重点实验室,广东广州510405

出　　处：《自动化与信息工程》2021年第4期33-36,41,共5页Automation & Information Engineering

基　　金：国家重点研发计划资助项目(2018YFF02123404)。

摘　　要：扫描电子显微镜是用于微观表面形貌观察、显微结构分析以及微纳米几何尺寸测量的常用分析仪器。由于仪器扫描图像时易出现放大倍率的偏差,导致图像畸变以及测长不准等问题,因此放大倍数示值误差是该类仪器校准的主要计量特性。利用微米至亚微米尺度一维线间距标样实现对扫描电子显微镜放大倍数示值误差的校准,并对校准结果的不确定度进行评定。Scanning electron microscope is a common analytical instrument for micro surface morphology observation, microstructure analysis and micro nano geometry measurement. Because the magnification deviation is easy to occur when the instrument scans the image, resulting in image distortion and inaccurate length measurement, the indication error of magnification is the main metrological characteristic of this kind of instrument calibration. The calibration of magnification indication error of scanning electron microscope is realized by using one-dimensional line spacing standard sample from micron to submicron, and the uncertainty of calibration results is evaluated.

关 键 词：扫描电子显微镜 格栅间距 放大倍数 示值误差 不确定度 

分 类 号：TB92[一般工业技术—计量学] TN16[机械工程—测试计量技术及仪器]