基于层合梁结构的弛豫铁电单晶矢量水听器  

Relaxor Ferroelectric Single Crystal Vector Hydrophones Based on Laminated Beam Structure

作　　者：涂馨予 李俊宝[1,3] 刘晓迪 申建康 TU Xinyu;LI Junbao;LIU Xiaodi;SHEN Jiankang(Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190,China;School of Physical Sciences,University of Chinese Academy of Sciences, Beijing 100049,China;Beijing Engineering Technology Research Center of Ocean Acoustic Equipment, Beijing 100190,China)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院大学物理科学学院,北京100049 [3]北京市海洋声学装备工程技术研究中心,北京100190

出　　处：《压电与声光》2021年第4期449-454,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11804366)。

摘　　要：为了满足低频高灵敏度声矢量接收需求,提出并研制了一种具有层合梁结构的弛豫铁电单晶二维同振型矢量水听器。矢量通道分别由两个正交的单晶层合梁加速度传感器组成,其中层合梁结构是通过在金属悬臂梁中引入阻尼层形成。通过有限元仿真分析了层合梁结构中单晶层厚度、阻尼层杨氏模量等参数对谐振频率及加速度灵敏度的影响。研制了多种加速度传感器及矢量水听器样品,相关测试结果表明,在材料上,所提出的单晶传感器比压电陶瓷具有更高的灵敏度;在结构上,层合梁矢量水听器比金属梁具有更低的谐振频率和谐振峰,在声压灵敏度及指向性凹坑方面均有3 dB的性能优势。In order to meet the requirements of low frequency and high sensitivity acoustic vector reception,a relaxor ferroelectric single crystal two-dimensional co-oscillating vector hydrophone with laminated beam(LB)structure is proposed and developed in this paper.The vector channel consists of two orthogonal single crystal acceleration sensors with LB structure,and the LB structure is formed by introducing a damping layer into the metal cantilever beam.The effects of the thickness of the single crystal layer and the Young modulus of the damping layer on the resonant frequency and acceleration sensitivity are analyzed through the finite element simulations.A variety of acceleration sensors and vector hydrophones are developed.The related test results show that the proposed single crystal sensor has higher sensitivity than that of the piezoelectric ceramics-based one in terms of materials.Compared with the metal beam,the LB-based vector hydrophone has lower resonant frequency and resonance peak,and has a performance advantage of 3 dB in both the acoustic pressure sensitivity and directivity pits in terms of the structures.

关 键 词：矢量水听器 弛豫铁电单晶 加速度传感器 层合梁结构 约束阻尼结构 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]