四自由度测量系统光束漂移抑制方法与系统  

Beam drift suppression method and system for a 4 DOF laser measurement system

作　　者：陶盼 李瑞君[1] 王勇俊 TAO Pan;LI Ruijun;WANG Yongjun(School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《中国测试》2021年第8期109-113,共5页China Measurement & Test

基　　金：国家重点研发计划(2017YFF0204800)。

摘　　要：在机床导轨几何误差测量中,空气折射率不均匀造成的光束漂移会降低激光测量系统的检测精度,测量距离越远,影响越大。基于此,该文提出一种波纹管和气泵均匀化空气折射率的方法,抑制光漂的发生。以四自由度激光测量系统为对象,首先分析光束漂移机理,确定影响空气折射率的主要因素为温度与压强,给出轴向最大允许温度与压强梯度;其次通过流体仿真选取合适的波纹管内径,最后搭建实验系统并在不同条件下进行实验测试。结果表明:利用该系统可使四自由度激光测量系统的光束稳定性提高50%以上。该方法的可行性和有效性得到了验证。In the measurement of the geometrical error of linear guide,laser beam drift caused by uneven air refractive index will greatly decreases the accuracy of laser measurement system.The longer the measurement distance,the greater the impact.A method was proposed based on bellows and air pumps to homogenize the refractive index of air.The laser beam drift is suppressed from the source.Object of study is a 4 DOF laser measurement system.Firstly,the beam drift mechanism was analyzed,and the main factors affecting the refractive index of air are temperature and pressure.The maximum allowable temperature and pressure gradient in the axial direction were given.Then,the appropriate inner diameter of bellows was selected by computer simulation.Finally,an experimental system was established and experiments were conducted under different coniditions.Experimental results indicated that the stability of the 4 DOF laser measurement system can be increased by more than 50%through this system.The feasibility and effectiveness of this method were verified.

关 键 词：激光测量系统 光束漂移 波纹管 流体分析 

分 类 号：TH741[机械工程—光学工程]