MEMS矢量传声器研究进展  

Research Progresses of MEMS Acoustic Vector Sensors

作　　者：刘云飞[1] 周瑜[1] 涂其捷 张学聪 魏晓村 冯杰[1] LIU Yunfei;ZHOU Yu;TU Qijie;ZHANG Xuecong;WEI Xiaocun;FENG Jie(The Third Research Institute of China Electronic Technology Group Corporation,Beijing 100015,China)

机构地区：[1]中国电子科技集团公司第三研究所,北京100015

出　　处：《电声技术》2021年第7期10-17,共8页Audio Engineering

摘　　要：矢量传声器由声压传感器和质点振速传感器复合构成,可时间同步、空间共点测量声场声压标量及质点振速矢量信息,在开展振动噪声监测、被动声测定位以及声全息成像等相关声学测试方面有着独特的优势,因而具有重要的工程应用价值。质点振速传感器是矢量传声器的核心部件,具有偶极子指向性,可直接感测声场质点振速各正交分量。基于此,介绍基于微机电系统(Micro-Electro-Mechanical System,MEMS)技术的矢量传声器的研究进展,概述MEMS矢量传声器的工作原理、设计制作及工程应用等方面的发展现状。Acoustic vector sensor is composed of sound pressure sensor and particle velocity sensor.The acoustic vector sensor can measure sound pressure and particle velocity information synchronously in time and space.The acoustic vector sensor has unique advantages in vibration and noise monitoring,passive acoustic positioning,acoustic holography and other related acoustic tests,so it has important engineering application value.The particle velocity sensor is the core component of the acoustic vector sensor,which has dipole directivity and can directly sense the orthogonal components of particle velocity in sound field.This paper introduces the research progress of the acoustic vector sensor which is based on Micro-Electro-Mechanical System(MEMS)technology,including its working principle,design and manufacture,and related engineering application.

关 键 词：矢量传声器 质点振速 MEMS 

分 类 号：TN911.7[电子电信—通信与信息系统]