微热板气体传感器低功耗工作模式研究  

Research on low power consumption operation mode of micro-hot-plate gas sensor

作　　者：朱思鹏 余隽[1] 李中洲[1] 吴昊[1] 唐祯安[1] ZHU Sipeng;YU Jun;LI Zhongzhou;WU Hao;TANG Zhenan(School of Biomedical Engineering,Faculty of EE,Liaoning Key Laboratory of Integrated Circuit and Biomedical Electronic System,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学电信学部生物医学工程学院辽宁省集成电路与生物医学电子系统重点实验室,辽宁大连116024

出　　处：《传感器与微系统》2021年第9期53-55,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61874018);中央高校基本科研业务费资助项目(DUT19LAB33)。

摘　　要：微热板气体传感器大多采用金属氧化物半导体气敏材料,通常需要工作在200~500℃的温度下才能获得良好的气敏特性。采用传统的直流电压加热模式时需要消耗数十毫瓦的功耗用于维持工作温度。必须进一步减小气体传感器的功耗,才能使之适用于微型无线传感网等对功耗要求苛刻的应用领域。研究了脉冲电压加热工作模式下微热板气体传感器对(20~100)×10^(-6)乙醇的气敏响应,优化了加热脉冲周期和占空比。实验证明:将微热板功耗降低1个数量级仍能获得良好的气体检测性能。Most of the micro-hot-plate gas sensors use metal oxide semiconductor gas-sensitive materials.Generally,they need to work at temperature range of 200~500℃to obtain good gas-sensitive characteristics.When using traditional DC voltage heating mode,it needs to consume tens of milliwatts of power consumption to maintain the operating temperature.The power consumption of the gas sensor must be further reduced in order to make it suitable for application fields that require severe power consumption,such as micro wireless sensor networks(WSNs).The gas-sensitive response of micro-hot-plate gas sensor to volume fraction range of 20×10^(-6) to 100×10^(-6) ethanol under pulsed voltage heating mode is studied,and the heating pulse period and duty cycle are optimized.Experimental results verify that reducing the power consumption of the micro-hot-plate by an order of magnitude can still obtain good gas detection performance.

关 键 词：微热板气体传感器 微型无线传感网 脉冲电压 低功耗 

分 类 号：TN492[电子电信—微电子学与固体电子学] TP21[自动化与计算机技术—检测技术与自动化装置]