应用于谐振式微悬臂梁接口电路的锁相环设计  

Design of PLL for interface circuit of resonant micro-cantilever beam

作　　者：张博 赵宏亮[1] 冯佳杰[1,2] 刘兴辉 宦鼎来[3] 赵野 ZHANG Bo;ZHAO Hongliang;FENG Jiajie;LIU Xinghui;HUAN Dinglai;ZHAO Ye(School of Physics,Liaoning University,Shenyang 110036,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;North China University of Technology,Beijing 100043,China)

机构地区：[1]辽宁大学物理学院,辽宁沈阳110036 [2]中国科学院微电子研究所,北京100029 [3]北方工业大学,北京100043

出　　处：《传感器与微系统》2021年第9期87-89,共3页Transducer and Microsystem Technologies

基　　金：国家重点研发计划“新能源汽车专项”项目(2016YFB0100516)。

摘　　要：针对谐振式微机电系统(MEMS)微悬臂梁传感器对接口电路自动锁频的需求,设计一种输出幅度约为400mV正弦波锁相环(PLL)电路,与MEMS悬臂梁单片集成构成闭环自激/检测系统。PLL电路设计了一种改进的差分型环形压控振荡器结构,既实现电压控制也可通过电流调控,以及“死区”时间优化的鉴频鉴相器,高匹配的电荷泵等电路。传感器整体电路基于绝缘体上硅(SOI)工艺设计制造,整体接口电路完成芯片测试,锁相环PLL电路可以对100~180 kHz宽输入范围内信号的连续锁定,实现传感器输入信号的精确跟踪,满足传感器检测需求。Aiming at the requirement of automatic frequency-locking of interface circuits of resonant MEMS micro-cantilever sensors,to design a phase locked loop(PLL)output amplitude of the sine wave of about 400 mV PLL circuit,and a closed loop monolithically integrated MEMS cantilever self-excitation/detection system.The PLL circuit is designed with an improved differential ring voltage-controlled oscillator structure,even if the voltage control can be realized through current regulation,and the"dead time"time-optimized phase detector,highly matched charge pump and other circuits.The overall circuit of the sensor is designed and manufactured based on the silicon on insulator(SOI)process,and the overall interface circuit completes the chip test.The phase-locked loop PLL circuit can continuously lock signals within a wide input range of 100~180 kHz to achieve accurate tracking of the sensor input signals and meet the sensor detection requirements.

关 键 词：微机电系统(MEMS) 接口电路 电荷泵锁相环 压控振荡器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN40[自动化与计算机技术—控制科学与工程]