微半球谐振陀螺仪的模态主轴方位角测算方法  

Measurement method of azimuth angle of modal principal axisbased on micro hemisphere resonance gyroscope

作　　者：吕骞 丁徐锴 陈鹤 贾佳 李宏生[1,2] L Qian;DING Xukai;CHEN He;JIA Jia;LI Hongsheng(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro Inertial Instrumentation and Advanced Navigation Technology,Ministry of Education,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学仪器科学与工程学院,江苏南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096

出　　处：《传感器与微系统》2021年第9期117-120,共4页Transducer and Microsystem Technologies

基　　金：教育部重点实验室(B类)开放基金资助项目(SEU-MIAN-201901)。

摘　　要：由于微半球谐振子吹制过程存在严重加工误差,将导致谐振子结构误差,进而导致微半球谐振子工作模态发生频率裂解和模态主轴轴向偏转,影响了陀螺仪的性能。而模态主轴方位角反映了谐振子的结构误差所在角度,可指导微谐振子结构误差研究和机械修调。本文从理想谐振子通用运动方程出发,推导了微半球谐振子误差模型,据此提出了一种可以通过电扫频所得数据计算微半球谐振子频率主轴方位角的方法。选择了两个Q值为1930和13390的微半球谐振子进行实验,得到二者的模态主轴方位角分别为30.36°和34.75°。最后通过仿真确定所提方法测得的模态主轴方位角有效。Due to severe processing errors in blowing process of micro hemisphere resonator,structure error of resonator will be caused,which will cause frequency splitting and deflection of modal principal axial which affect property of gyroscope.The azimuth angle of the modal principal axis reflects the angle of the structural error of the resonator,which can guide the structural error research and mechanical adjustment of the microresonator.Based on the general equation of motion of an ideal harmonic oscillator,the error model of the micro hemisphere resonator is derived.A method can be used to calculate the azimuth of the principal axis based on data obtained by electric frequency sweeping.Two micro hemisphere resonators with Q of 1930 and 13390 are selected for experiments.The modal principal axial azimuth angles of the two are 30.36°and 34.75°,respectively.Finally,it is confirmed through simulation that the azimuth angle of the modal principal axial measured by this method is valid.

关 键 词：微半球 微机电系统(MEMS)振动陀螺仪 主轴方位角 频率误差 误差模型 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TP212[自动化与计算机技术—检测技术与自动化装置]