飞秒激光逐点法制备光纤布拉格光栅高温传感器阵列  

High-Temperature Sensor Array Based on Fiber Bragg Gratings Fabricated by Femtosecond Laser Point-by-Point Method

作　　者：陈梓泳 何俊[1,2] 徐锡镇 贺佳 许百杰 杜斌 廖常锐[1,2] 王义平[1,2] Chen Ziyong;He Jun;Xu Xizhen;He Jia;Xu Baijie;Du Bin;Liao Changrui;Wang Yiping(Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen,Guangdong 518060,China;Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,Shenzhen University,Shenzhen,Guangdong 518060,China)

机构地区：[1]深圳大学物理与光电工程学院光电子器件与系统教育部/广东省重点实验室,广东深圳518060 [2]深圳大学广东省光纤传感技术粤港联合研究中心深圳市物联网光子器件与传感系统重点实验室,广东深圳518060

出　　处：《光学学报》2021年第13期15-23,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61875128);国家自然科学基金联合基金(U1913212);“广东特支计划”科技创新青年拔尖人才(2019TQ05X113)。

摘　　要：高温传感器在航空航天、核能电力、冶金工业等领域有着重要的研究与应用价值。为了实现光纤布拉格光栅(FBG)在高温传感领域的应用,研究了FBG阵列的制备技术、退火工艺和温度-波长拟合方法。首先,利用飞秒激光逐点法制备波分复用FBG阵列,并采用优化的工艺参数(飞秒激光脉冲能量、光纤移动速度、FBG长度)制备了1510~1580 nm范围内9个不同波长的FBG阵列。然后,研究了退火温度和退火时间对FBG中心波长的影响,通过高温长时间退火(700℃、195 h)处理提高了FBG的波长稳定性,在700℃下FBG的波长漂移率小于-2 pm/h。最后,研究了不同中心波长FBG的高温响应特性,获得了不同中心波长FBG的通用温度-波长拟合函数。实验结果表明,在700℃高温下FBG阵列传感器的测温精度优于±1.8℃,该传感器有望应用于航空发动机、高速飞行器、核反应堆堆芯等极端环境中的高温测量。High-temperature sensors have important research and application value in aerospace, nuclear power, metallurgical industry, and other fields. To apply fiber Bragg gratings(FBG) to high-temperature sensing, this paper studies the preparation technology, annealing process, and temperature-wavelength fitting method of FBG arrays. First, a wavelength division multiplexed FBG array is prepared by the femtosecond laser point-by-point method, and FBG arrays with 9 different wavelengths in the range of 1510--1580 nm are prepared with optimized process parameters(femtosecond laser pulse energy, fiber moving speed, and FBG length). Then, the effect of annealing temperature and time on the center wavelength of FBG is examined, and the wavelength stability of FBG is improved by high-temperature and long-term annealing(700 ℃, 195 h), with the wavelength drift rate of FBG at 700 ℃ less than-2 pm/h. Finally, the high-temperature response of FBG with different center wavelengths are studied, and the general temperature-wavelength fitting functions of these FBG are obtained. The experimental results show that the temperature measurement accuracy of the FBG array sensor is better than ±1.8 ℃ at 700 ℃. The sensor is expected to be used for high-temperature measurement in extreme environments such as aeroengines, high-speed aircraft, and nuclear reactor cores.

关 键 词：光纤光学 光纤传感器 光纤布拉格光栅 高温传感器 飞秒激光 

分 类 号：O436[机械工程—光学工程]